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Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction
Masanori Shinohara, Taisuke Tominaga, Hayato Shimomura, Takeshi Ihara, Yoshihito Yagyu, Tamiko Ohshima, Hiroharu Kawasaki
Research output: Contribution to journal › Article › peer-review