Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application

M. Nakada, K. Takahashi, A. Higo, H. Fujita, H. Toshiyoshi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.

Original languageEnglish
Title of host publication2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
Pages48-49
Number of pages2
DOIs
Publication statusPublished - 2008
Externally publishedYes
Event2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, Germany
Duration: Aug 11 2008Aug 14 2008

Publication series

Name2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Other

Other2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
CountryGermany
CityFreiburg
Period8/11/088/14/08

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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