TY - GEN
T1 - Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application
AU - Nakada, M.
AU - Takahashi, K.
AU - Higo, A.
AU - Fujita, H.
AU - Toshiyoshi, H.
PY - 2008
Y1 - 2008
N2 - We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.
AB - We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.
UR - http://www.scopus.com/inward/record.url?scp=54049119314&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=54049119314&partnerID=8YFLogxK
U2 - 10.1109/OMEMS.2008.4607822
DO - 10.1109/OMEMS.2008.4607822
M3 - Conference contribution
AN - SCOPUS:54049119314
SN - 9781424419180
T3 - 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
SP - 48
EP - 49
BT - 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
T2 - 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
Y2 - 11 August 2008 through 14 August 2008
ER -