TY - GEN
T1 - Design of ultrashort Kirkpatrick-Baez mirror for soft x-ray nanofocusing
AU - Shimamura, Takenori
AU - Takeo, Yoko
AU - Kimura, Takashi
AU - Hashizume, Hirokazu
AU - Senba, Yasunori
AU - Kishimoto, Hikaru
AU - Mimura, Hidekazu
N1 - Funding Information:
We acknowledge a Grant-in-Aid for Challenging Research (Pioneering) (Grant Number JP19H05523) and a Grant-in-Aid for JSPS Fellows (Grant Number JP20J21562) from the Ministry of Education, Sports, Culture, Science and Technology, Japan (MEXT). This work was also supported by BL25SU-A at SPring-8 with the approval of the Japan Synchrotron Radiation Research Institute (JASRI) (Proposal No. 2019B1628).
PY - 2020
Y1 - 2020
N2 - X-ray focusing optics are essential for acquiring high-quality X-ray microscopy images. Fresnel zone plates (FZPs) are conventionally used to focus soft X-rays via diffraction. The use of Kirkpatrick-Baez (KB) mirrors for nanofocusing in the soft X-ray region is limited because a KB mirror is a reflective X-ray focusing optic that has a pair of perpendicular mirrors in a grazing-incidence configuration, which lowers the numerical aperture due to the long focal length. KB mirrors with a short focal length have been proposed for hard X-ray focusing. This paper presents the design of an ultrashort KB mirror for soft X-ray focusing that has an extremely short focal length, which is achieved by reducing its mirror length. Moreover, a large grazing angle is employed to utilize total-reflection-based focusing. An ultrashort KB mirror is proposed for pilot studies at beamline BL25SU-A, SPring-8, Japan. A ray-tracing simulator is used to determine the misalignment tolerance in terms of roll and yaw for each mirror in the KB geometry. Based on the results, a mirror manipulator and other equipment are designed to precisely position the mirrors. Although this strategy, commonly used for FZPs, leads to a short working distance and a small beam acceptance, we believe that it can be applied to ultrashort KB mirrors for X-ray microscopy applications with achromaticity and strong demagnification.
AB - X-ray focusing optics are essential for acquiring high-quality X-ray microscopy images. Fresnel zone plates (FZPs) are conventionally used to focus soft X-rays via diffraction. The use of Kirkpatrick-Baez (KB) mirrors for nanofocusing in the soft X-ray region is limited because a KB mirror is a reflective X-ray focusing optic that has a pair of perpendicular mirrors in a grazing-incidence configuration, which lowers the numerical aperture due to the long focal length. KB mirrors with a short focal length have been proposed for hard X-ray focusing. This paper presents the design of an ultrashort KB mirror for soft X-ray focusing that has an extremely short focal length, which is achieved by reducing its mirror length. Moreover, a large grazing angle is employed to utilize total-reflection-based focusing. An ultrashort KB mirror is proposed for pilot studies at beamline BL25SU-A, SPring-8, Japan. A ray-tracing simulator is used to determine the misalignment tolerance in terms of roll and yaw for each mirror in the KB geometry. Based on the results, a mirror manipulator and other equipment are designed to precisely position the mirrors. Although this strategy, commonly used for FZPs, leads to a short working distance and a small beam acceptance, we believe that it can be applied to ultrashort KB mirrors for X-ray microscopy applications with achromaticity and strong demagnification.
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U2 - 10.1117/12.2569845
DO - 10.1117/12.2569845
M3 - Conference contribution
AN - SCOPUS:85092452015
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advances in Metrology for X-Ray and EUV Optics IX
A2 - Assoufid, Lahsen
A2 - Ohashi, Haruhiko
A2 - Asundi, Anand
PB - SPIE
T2 - Advances in Metrology for X-Ray and EUV Optics IX 2020
Y2 - 24 August 2020 through 4 September 2020
ER -