Detailed gas phase chemistry in CVD of carbon from unsaturated light hydrocarbons

Koyo Norinaga, Olaf Deutschmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

An in-pore CVD of carbon, i.e., chemical vapor infiltration (CVI) is widely used to produce C/C composites. For the optimization of the process, it is important to understand the CVD of carbon at the level of elementary reactions. In this study, a model was developed to simulate complex gas phase reactions proceeding in CVD of carbon from unsaturated light hydrocarbons (C 2H4, C2H2, and C3H 6) by using a software package for computing time-dependent homogenous reaction systems. CVD experiments were performed with a vertical up-flow reactor at a temperature of 900°C, pressure ranging from 2 to 15 kPa, residence times up to 2 s, and a substrate surface area/volume ratio of 3.2 mm-1. Gas phase components were analyzed by both on-line and ex-situ GC with good material balances of more than 90 %. The model which involves 230 species and 757 reactions can predict the profiles of 30 gas phase components from hydrogen to coronene (C24H12) with an acceptable level of accuracy.

Original languageEnglish
Title of host publicationEUROCVD-15: Fifteenth European Conference on Chemical Vapor Deposition
EditorsA. Devi, R. Fischer, H. Parala, M.D. Allendorf, M. Hitchman
Pages348-355
Number of pages8
VolumePV 2005-09
Publication statusPublished - 2005
Externally publishedYes
Event15th European Conference on Chemical Vapor Deposition, EUROCVD-15 - Bochum, Germany
Duration: Sep 5 2005Sep 9 2005

Other

Other15th European Conference on Chemical Vapor Deposition, EUROCVD-15
CountryGermany
CityBochum
Period9/5/059/9/05

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All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Norinaga, K., & Deutschmann, O. (2005). Detailed gas phase chemistry in CVD of carbon from unsaturated light hydrocarbons. In A. Devi, R. Fischer, H. Parala, M. D. Allendorf, & M. Hitchman (Eds.), EUROCVD-15: Fifteenth European Conference on Chemical Vapor Deposition (Vol. PV 2005-09, pp. 348-355)