Determination of absolute thickness and mean free path of thin foil specimen by ζ-factor method

Katsunori Ohshima, Kenji Kaneko, Takeshi Fujita, Zenji Horita

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The ζ-factor method is applied to the thickness determination of thin amorphous specimens where the convergent-beam electron diffraction method is not applicable. Characteristic X-ray intensities are first measured using standard specimens in order to determine ζ-factors. These ζ-factors are then used to determine local thicknesses of an amorphous Si and an amorphous Al alloy. Electron energy-loss spectroscopy (EELS) spectra are acquired at the same positions as for the X-ray measurements. Thus, using the thicknesses measured from the ζ-factor method, the electron meanfree path is determined through the EELS log-ratio method. The mean free path is measured as a function of the collection semi-angle, β, and specimen thickness, and it is also compared with theoretical values. Furthermore, the mean free path of amorphous Si is compared with that of the crystalline Si.

Original languageEnglish
Pages (from-to)137-142
Number of pages6
JournalJournal of Electron Microscopy
Volume53
Issue number2
DOIs
Publication statusPublished - May 25 2004

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mean free path
Metal foil
foils
Electron Energy-Loss Spectroscopy
Electron energy loss spectroscopy
X rays
energy dissipation
X-Rays
Amorphous alloys
Electrons
electron energy
Electron diffraction
electron trajectories
spectroscopy
Crystalline materials
x rays
electron diffraction

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this

Determination of absolute thickness and mean free path of thin foil specimen by ζ-factor method. / Ohshima, Katsunori; Kaneko, Kenji; Fujita, Takeshi; Horita, Zenji.

In: Journal of Electron Microscopy, Vol. 53, No. 2, 25.05.2004, p. 137-142.

Research output: Contribution to journalArticle

Ohshima, Katsunori ; Kaneko, Kenji ; Fujita, Takeshi ; Horita, Zenji. / Determination of absolute thickness and mean free path of thin foil specimen by ζ-factor method. In: Journal of Electron Microscopy. 2004 ; Vol. 53, No. 2. pp. 137-142.
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