Determination of 16O and 18O sensitivity factors and charge-exchange processes in low-energy ion scattering

H. Téllez, R. J. Chater, S. Fearn, E. Symianakis, H. H. Brongersma, J. A. Kilner

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Abstract

Quantitative analysis in low-energy ion scattering (LEIS) requires an understanding of the charge-exchange processes to estimate the elemental sensitivity factors. In this work, the neutralization of He scattered by 18O-exchanged silica at energies between 0.6 and 7 keV was studied. The process is dominated by Auger neutralization for E i 0.8 keV. An additional mechanism starts above the reionization threshold. This collision-induced neutralization becomes the dominant mechanism for E i > 2 keV. The ion fractions P were determined for Si and O using the characteristic velocity method to quantify the surface density. The 18O/ 16O sensitivity ratio indicates an 18 higher sensitivity for the heavier O isotope.

Original languageEnglish
Article number151602
JournalApplied Physics Letters
Volume101
Issue number15
DOIs
Publication statusPublished - Oct 8 2012

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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    Téllez, H., Chater, R. J., Fearn, S., Symianakis, E., Brongersma, H. H., & Kilner, J. A. (2012). Determination of 16O and 18O sensitivity factors and charge-exchange processes in low-energy ion scattering. Applied Physics Letters, 101(15), [151602]. https://doi.org/10.1063/1.4758699