Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions

K. Maehata, N. Iyomoto, M. Maeda, S. Ezaki, A. Takano, S. Matsumura, T. Hara, K. Mitsuda, N. Y. Yamasaki, K. Tanaka

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta22O5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- μ m-type microcalorimeter.

Original languageEnglish
Pages (from-to)578-583
Number of pages6
JournalJournal of Low Temperature Physics
Volume176
Issue number3-4
DOIs
Publication statusPublished - Aug 2014

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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