Development of 600V-class trench filling SJ-MOSFET with SSRM analysis technology

Syotaro Ono, Li Zhang, Hiroshi Ohta, Miho Watanabe, Wataru Saito, Shingo Sato, Hiroyuki Sugaya, Masakazu Yamaguchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

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Engineering & Materials Science