Development of a 915 MHz ECR plasma source

Yoshinobu Kawai, Kiichiro Uchino, Hiroshi Muta, Tobias Röwf

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

We produced a 915 MHz ECR plasma with TM01 microwaves for different magnetic flux density distributions and examined the radial profiles of the ion saturation current as a function of pressure and power. It was found that the 915 MHz ECR plasma is uniform over 200 mm in diameter around the L-cutoff density and when a diverging magnetic field is used, a low electron temperature plasma is realized.

Original languageEnglish
Pages (from-to)123-127
Number of pages5
JournalVacuum
Volume87
DOIs
Publication statusPublished - 2013

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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