Abstract
We produced a 915 MHz ECR plasma with TM01 microwaves for different magnetic flux density distributions and examined the radial profiles of the ion saturation current as a function of pressure and power. It was found that the 915 MHz ECR plasma is uniform over 200 mm in diameter around the L-cutoff density and when a diverging magnetic field is used, a low electron temperature plasma is realized.
Original language | English |
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Pages (from-to) | 123-127 |
Number of pages | 5 |
Journal | Vacuum |
Volume | 87 |
DOIs | |
Publication status | Published - 2013 |
All Science Journal Classification (ASJC) codes
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films