Development of a Built-In Micro-Laser Doppler Velocimeter

Nobutomo Morita, Hirofumi Nogami, Eiji Higurashi, Takahiro Ito, Renshi Sawada

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Our research group previously developed an integrated micro-laser Doppler velocimeter only 2.8 × 2.8 mm in area and 1-mm thick by minimizing a number of components with multifunctional parts, such as a glass cover with lenses for hermetic sealing and laser collimation, a silicon base for casing, a mirror mount, a laser diode bench, and others. In this paper, by applying a fast Fourier transform analysis to the sensor output, we successfully measured the velocities of plastic, paper, and aluminum objects over a wide velocity range, from 10 μm/s to 10 mm/s, within a 3.3% measurement error, without attaching any scale to the measurement target. We also verified feasible measurement distances for each object and examined how tilt installation error affected the measurements.

Original languageEnglish
Article number7397850
Pages (from-to)380-387
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume25
Issue number2
DOIs
Publication statusPublished - Apr 2016

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this