Development of a Built-In Micro-Laser Doppler Velocimeter

Nobutomo Morita, Hirofumi Nogami, Eiji Higurashi, Takahiro Ito, Renshi Sawada

    Research output: Contribution to journalArticlepeer-review

    11 Citations (Scopus)

    Abstract

    Our research group previously developed an integrated micro-laser Doppler velocimeter only 2.8 × 2.8 mm in area and 1-mm thick by minimizing a number of components with multifunctional parts, such as a glass cover with lenses for hermetic sealing and laser collimation, a silicon base for casing, a mirror mount, a laser diode bench, and others. In this paper, by applying a fast Fourier transform analysis to the sensor output, we successfully measured the velocities of plastic, paper, and aluminum objects over a wide velocity range, from 10 μm/s to 10 mm/s, within a 3.3% measurement error, without attaching any scale to the measurement target. We also verified feasible measurement distances for each object and examined how tilt installation error affected the measurements.

    Original languageEnglish
    Article number7397850
    Pages (from-to)380-387
    Number of pages8
    JournalJournal of Microelectromechanical Systems
    Volume25
    Issue number2
    DOIs
    Publication statusPublished - Apr 2016

    All Science Journal Classification (ASJC) codes

    • Mechanical Engineering
    • Electrical and Electronic Engineering

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