Our research group previously developed an integrated micro-laser Doppler velocimeter only 2.8 × 2.8 mm in area and 1-mm thick by minimizing a number of components with multifunctional parts, such as a glass cover with lenses for hermetic sealing and laser collimation, a silicon base for casing, a mirror mount, a laser diode bench, and others. In this paper, by applying a fast Fourier transform analysis to the sensor output, we successfully measured the velocities of plastic, paper, and aluminum objects over a wide velocity range, from 10 μm/s to 10 mm/s, within a 3.3% measurement error, without attaching any scale to the measurement target. We also verified feasible measurement distances for each object and examined how tilt installation error affected the measurements.
All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering