Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources

Kentaro Tomita, Yuta Sato, Kazutaka Nishikawa, Kiichiro Uchino, Tatsuya Yanagida, Hiroaki Tomuro, Yasunori Wada, Masahito Kunishima, Takeshi Kodama, Hakaru Mizoguchi, Atsushi Sunahara

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Abstract

Spatial profiles of electron density (ne) and electron temperature (Te) of laser-produced Sn plasmas for extreme-ultraviolet (EUV) light sources have been obtained using a new collective Thomson scattering system, which has been optimized for the measurement of the ion feature spectrum. The system has an 18pm spectral resolution, a 5 ns temporal resolution, a 50 μm spatial resolution, and sufficient stray-light rejection near the probing laser wavelength. With this system, measurements of the laser-produced Sn plasmas in the parameter ranges of 3 × 1023 < ne < 1025m-3 and 10 < Te < 20 eV have been performed.

Original languageEnglish
Article number126101
JournalApplied Physics Express
Volume8
Issue number12
DOIs
Publication statusPublished - Dec 2015

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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    Tomita, K., Sato, Y., Nishikawa, K., Uchino, K., Yanagida, T., Tomuro, H., Wada, Y., Kunishima, M., Kodama, T., Mizoguchi, H., & Sunahara, A. (2015). Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources. Applied Physics Express, 8(12), [126101]. https://doi.org/10.7567/APEX.8.126101