Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources

Kentaro Tomita, Yuta Sato, Kazutaka Nishikawa, Kiichiro Uchino, Tatsuya Yanagida, Hiroaki Tomuro, Yasunori Wada, Masahito Kunishima, Takeshi Kodama, Hakaru Mizoguchi, Atsushi Sunahara

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Spatial profiles of electron density (n e ) and electron temperature (T e ) of laser-produced Sn plasmas for extreme-ultraviolet (EUV) light sources have been obtained using a new collective Thomson scattering system, which has been optimized for the measurement of the ion feature spectrum. The system has an 18pm spectral resolution, a 5 ns temporal resolution, a 50 μm spatial resolution, and sufficient stray-light rejection near the probing laser wavelength. With this system, measurements of the laser-produced Sn plasmas in the parameter ranges of 3 × 1023 < n e < 10 25 m -3 and 10 < T e < 20 eV have been performed.

Original languageEnglish
Article number126101
JournalApplied Physics Express
Volume8
Issue number12
DOIs
Publication statusPublished - Dec 1 2015

Fingerprint

Laser produced plasmas
Thomson scattering
ultraviolet radiation
Tin
Light sources
tin
light sources
Scattering
Stray light
Plasmas
Lasers
Spectral resolution
Electron temperature
Optical resolving power
lasers
Carrier concentration
temporal resolution
spectral resolution
rejection
Wavelength

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources. / Tomita, Kentaro; Sato, Yuta; Nishikawa, Kazutaka; Uchino, Kiichiro; Yanagida, Tatsuya; Tomuro, Hiroaki; Wada, Yasunori; Kunishima, Masahito; Kodama, Takeshi; Mizoguchi, Hakaru; Sunahara, Atsushi.

In: Applied Physics Express, Vol. 8, No. 12, 126101, 01.12.2015.

Research output: Contribution to journalArticle

Tomita, K, Sato, Y, Nishikawa, K, Uchino, K, Yanagida, T, Tomuro, H, Wada, Y, Kunishima, M, Kodama, T, Mizoguchi, H & Sunahara, A 2015, 'Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources', Applied Physics Express, vol. 8, no. 12, 126101. https://doi.org/10.7567/APEX.8.126101
Tomita, Kentaro ; Sato, Yuta ; Nishikawa, Kazutaka ; Uchino, Kiichiro ; Yanagida, Tatsuya ; Tomuro, Hiroaki ; Wada, Yasunori ; Kunishima, Masahito ; Kodama, Takeshi ; Mizoguchi, Hakaru ; Sunahara, Atsushi. / Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources. In: Applied Physics Express. 2015 ; Vol. 8, No. 12.
@article{515fd5ae6c5240ac8fa038ba3fb32ee5,
title = "Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources",
abstract = "Spatial profiles of electron density (n e ) and electron temperature (T e ) of laser-produced Sn plasmas for extreme-ultraviolet (EUV) light sources have been obtained using a new collective Thomson scattering system, which has been optimized for the measurement of the ion feature spectrum. The system has an 18pm spectral resolution, a 5 ns temporal resolution, a 50 μm spatial resolution, and sufficient stray-light rejection near the probing laser wavelength. With this system, measurements of the laser-produced Sn plasmas in the parameter ranges of 3 × 1023 < n e < 10 25 m -3 and 10 < T e < 20 eV have been performed.",
author = "Kentaro Tomita and Yuta Sato and Kazutaka Nishikawa and Kiichiro Uchino and Tatsuya Yanagida and Hiroaki Tomuro and Yasunori Wada and Masahito Kunishima and Takeshi Kodama and Hakaru Mizoguchi and Atsushi Sunahara",
year = "2015",
month = "12",
day = "1",
doi = "10.7567/APEX.8.126101",
language = "English",
volume = "8",
journal = "Applied Physics Express",
issn = "1882-0778",
publisher = "Japan Society of Applied Physics",
number = "12",

}

TY - JOUR

T1 - Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources

AU - Tomita, Kentaro

AU - Sato, Yuta

AU - Nishikawa, Kazutaka

AU - Uchino, Kiichiro

AU - Yanagida, Tatsuya

AU - Tomuro, Hiroaki

AU - Wada, Yasunori

AU - Kunishima, Masahito

AU - Kodama, Takeshi

AU - Mizoguchi, Hakaru

AU - Sunahara, Atsushi

PY - 2015/12/1

Y1 - 2015/12/1

N2 - Spatial profiles of electron density (n e ) and electron temperature (T e ) of laser-produced Sn plasmas for extreme-ultraviolet (EUV) light sources have been obtained using a new collective Thomson scattering system, which has been optimized for the measurement of the ion feature spectrum. The system has an 18pm spectral resolution, a 5 ns temporal resolution, a 50 μm spatial resolution, and sufficient stray-light rejection near the probing laser wavelength. With this system, measurements of the laser-produced Sn plasmas in the parameter ranges of 3 × 1023 < n e < 10 25 m -3 and 10 < T e < 20 eV have been performed.

AB - Spatial profiles of electron density (n e ) and electron temperature (T e ) of laser-produced Sn plasmas for extreme-ultraviolet (EUV) light sources have been obtained using a new collective Thomson scattering system, which has been optimized for the measurement of the ion feature spectrum. The system has an 18pm spectral resolution, a 5 ns temporal resolution, a 50 μm spatial resolution, and sufficient stray-light rejection near the probing laser wavelength. With this system, measurements of the laser-produced Sn plasmas in the parameter ranges of 3 × 1023 < n e < 10 25 m -3 and 10 < T e < 20 eV have been performed.

UR - http://www.scopus.com/inward/record.url?scp=84948808009&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84948808009&partnerID=8YFLogxK

U2 - 10.7567/APEX.8.126101

DO - 10.7567/APEX.8.126101

M3 - Article

AN - SCOPUS:84948808009

VL - 8

JO - Applied Physics Express

JF - Applied Physics Express

SN - 1882-0778

IS - 12

M1 - 126101

ER -