Development of a deep-hole measuring system by using autocollimation principle (2nd report) - Evaluation of a fabricated apparatus and evaluative experiments -

Hiroshi Murakami, Akio Katsuki, Hiromichi Onikura, Takao Sajima

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The measuring system for evaluating the accuracy of a deep hole is developed by using the autocollimation principle. The system consists of a measuring unit and an optical system for light reception. The measuring unit comprises one laser diode, two mirrors, two quarter-wave plates, one polarizing beam splitter, and a feeler. The system detects the displacement of a feeler on the basis of the autocollimation principle. The optical system for light reception, which receives the laser beam irradiated from the laser diode in the measuring unit, comprises a plano-convex lens and a CCD camera. In this research, the measuring unit is manufactured for trial and its measuring accuracies are examined by using the basic experimental apparatus. As a result, the followings are clarified. The optimum values of the CCD image processing parameters are 60 in threshold and 250 μ s in exposure. The error of measurement by using the measuring unit is ±0.26 μm. Measurement error of its rotational angle is ±0.01°.

Original languageEnglish
Pages (from-to)504-508
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume74
Issue number5
DOIs
Publication statusPublished - May 1 2008

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Optical systems
Semiconductor lasers
CCD cameras
Measurement errors
Charge coupled devices
Laser beams
Lenses
Image processing
Experiments

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this

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