Development of a deep-hole measuring system by using autocollimation principle optical analysis and its verification experiment

Akio Katsuki, Hiroshi Murakami, Hiromichi Onikura, Takao Sajima

Research output: Contribution to journalArticle

Abstract

The measuring system for evaluating the accuracy of a deep hole is developed by using the autocollimation principle. The system consists of a measuring unit and an optical system for light reception. The measuring unit comprises one laser diode, two mirrors, two quarter-wave plates, one polarizing beam splitter, and a feeler. It detects the displacement of a feeler on the basis of the autocollimation principle. The optical system for light reception, which receives the laser beam irradiated from the measuring unit, comprises a plano-convex lens and a CCD camera and receives the laser beam irradiated from the measuring unit. In this study, the evaluation function of various errors of the optical system is derived using ray tracing and their effect on the measuring accuracy is examined. The results show that the measurement error of the deep-hole measuring system due to the misalignment of the optical parts is about ±1 μm and that the detection error of the mirror angle due to the lens aberration used in the optical system for light reception can be reduced to less than 0.003° , which corresponds to the displacement of 0.87 μm of the feeler.

Original languageEnglish
Pages (from-to)813-817
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume73
Issue number7
DOIs
Publication statusPublished - Dec 1 2007

Fingerprint

Optical systems
Laser beams
Lenses
Experiments
Function evaluation
Error detection
Ray tracing
CCD cameras
Measurement errors
Aberrations
Semiconductor lasers
Mirrors

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this

Development of a deep-hole measuring system by using autocollimation principle optical analysis and its verification experiment. / Katsuki, Akio; Murakami, Hiroshi; Onikura, Hiromichi; Sajima, Takao.

In: Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, Vol. 73, No. 7, 01.12.2007, p. 813-817.

Research output: Contribution to journalArticle

@article{dcc74283b4bd40bebd17514156a72294,
title = "Development of a deep-hole measuring system by using autocollimation principle optical analysis and its verification experiment",
abstract = "The measuring system for evaluating the accuracy of a deep hole is developed by using the autocollimation principle. The system consists of a measuring unit and an optical system for light reception. The measuring unit comprises one laser diode, two mirrors, two quarter-wave plates, one polarizing beam splitter, and a feeler. It detects the displacement of a feeler on the basis of the autocollimation principle. The optical system for light reception, which receives the laser beam irradiated from the measuring unit, comprises a plano-convex lens and a CCD camera and receives the laser beam irradiated from the measuring unit. In this study, the evaluation function of various errors of the optical system is derived using ray tracing and their effect on the measuring accuracy is examined. The results show that the measurement error of the deep-hole measuring system due to the misalignment of the optical parts is about ±1 μm and that the detection error of the mirror angle due to the lens aberration used in the optical system for light reception can be reduced to less than 0.003° , which corresponds to the displacement of 0.87 μm of the feeler.",
author = "Akio Katsuki and Hiroshi Murakami and Hiromichi Onikura and Takao Sajima",
year = "2007",
month = "12",
day = "1",
doi = "10.2493/jjspe.73.813",
language = "English",
volume = "73",
pages = "813--817",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "7",

}

TY - JOUR

T1 - Development of a deep-hole measuring system by using autocollimation principle optical analysis and its verification experiment

AU - Katsuki, Akio

AU - Murakami, Hiroshi

AU - Onikura, Hiromichi

AU - Sajima, Takao

PY - 2007/12/1

Y1 - 2007/12/1

N2 - The measuring system for evaluating the accuracy of a deep hole is developed by using the autocollimation principle. The system consists of a measuring unit and an optical system for light reception. The measuring unit comprises one laser diode, two mirrors, two quarter-wave plates, one polarizing beam splitter, and a feeler. It detects the displacement of a feeler on the basis of the autocollimation principle. The optical system for light reception, which receives the laser beam irradiated from the measuring unit, comprises a plano-convex lens and a CCD camera and receives the laser beam irradiated from the measuring unit. In this study, the evaluation function of various errors of the optical system is derived using ray tracing and their effect on the measuring accuracy is examined. The results show that the measurement error of the deep-hole measuring system due to the misalignment of the optical parts is about ±1 μm and that the detection error of the mirror angle due to the lens aberration used in the optical system for light reception can be reduced to less than 0.003° , which corresponds to the displacement of 0.87 μm of the feeler.

AB - The measuring system for evaluating the accuracy of a deep hole is developed by using the autocollimation principle. The system consists of a measuring unit and an optical system for light reception. The measuring unit comprises one laser diode, two mirrors, two quarter-wave plates, one polarizing beam splitter, and a feeler. It detects the displacement of a feeler on the basis of the autocollimation principle. The optical system for light reception, which receives the laser beam irradiated from the measuring unit, comprises a plano-convex lens and a CCD camera and receives the laser beam irradiated from the measuring unit. In this study, the evaluation function of various errors of the optical system is derived using ray tracing and their effect on the measuring accuracy is examined. The results show that the measurement error of the deep-hole measuring system due to the misalignment of the optical parts is about ±1 μm and that the detection error of the mirror angle due to the lens aberration used in the optical system for light reception can be reduced to less than 0.003° , which corresponds to the displacement of 0.87 μm of the feeler.

UR - http://www.scopus.com/inward/record.url?scp=77950267203&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77950267203&partnerID=8YFLogxK

U2 - 10.2493/jjspe.73.813

DO - 10.2493/jjspe.73.813

M3 - Article

AN - SCOPUS:77950267203

VL - 73

SP - 813

EP - 817

JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

SN - 0912-0289

IS - 7

ER -