Development of a Large-scale 3D MEMS Optical Switch Module

Tsuyoshi Yamamoto, Johji Yamaguchi, Renshi Sawada, Yuji Uenishi

Research output: Contribution to journalArticle

23 Citations (Scopus)


A three-dimensional (3D) micro-electro-mechanical system (MEMS) optical switch, consisting of two-axis tilt mirror arrays and free-space optics, is a practical solution for constructing large-scale switching fabrics due to its high component density and low cost. The MEMS-mirror arrays developed by NTT are single-crystal silicon mirrors integrated with high-aspect ratio torsion springs and actuated by electrostatic forces. The free-space optics consist of low-cost high-precision polymer components assembled passively. A prototype module with 100-channel optical fiber input/output exhibited a low coupling loss of 4.0 dB and a switching time of 3 ms.

Original languageEnglish
Pages (from-to)37-42
Number of pages6
JournalNTT Technical Review
Issue number7
Publication statusPublished - Oct 1 2003


All Science Journal Classification (ASJC) codes

  • Computer Science Applications
  • Computer Networks and Communications
  • Electrical and Electronic Engineering

Cite this

Yamamoto, T., Yamaguchi, J., Sawada, R., & Uenishi, Y. (2003). Development of a Large-scale 3D MEMS Optical Switch Module. NTT Technical Review, 1(7), 37-42.