Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability

Hiroshi Murakami, Akio Katsuki, Hiromichi Onikura, Takao Sajima, Norio Kawagoishi, Eiji Kondo, Tomohiro Honda

Research output: Contribution to conference › Paper

Abstract

This paper presents a micro hole measuring system using an optical fiber probe. The probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. In this research, the accuracy and repeatability of such measurement are examined by measuring a roughness standard specimen and a micro hole. The results clarify that the probe has a resolution of 15 nm and the repeatability error for 10 measurements of a roughness standard specimen is within ±0.1 μm in touch trigger mode and ± 0.03 μm in scanning mode.

Original languageEnglish
Publication statusPublished - Dec 1 2009
Event5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
Duration: Dec 2 2009 → Dec 4 2009

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
CountryJapan
CityOsaka
Period12/2/09 → 12/4/09

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Optical fibers
Surface roughness
Scanning

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

Cite this

Murakami, H., Katsuki, A., Onikura, H., Sajima, T., Kawagoishi, N., Kondo, E., & Honda, T. (2009). Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability. Paper presented at 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan.

Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability. / Murakami, Hiroshi; Katsuki, Akio; Onikura, Hiromichi; Sajima, Takao; Kawagoishi, Norio; Kondo, Eiji; Honda, Tomohiro.

2009. Paper presented at 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan.

Research output: Contribution to conference › Paper

Murakami, H, Katsuki, A, Onikura, H, Sajima, T, Kawagoishi, N, Kondo, E & Honda, T 2009, 'Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability', Paper presented at 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan, 12/2/09 - 12/4/09.
Murakami H, Katsuki A, Onikura H, Sajima T, Kawagoishi N, Kondo E et al. Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability. 2009. Paper presented at 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan.
Murakami, Hiroshi ; Katsuki, Akio ; Onikura, Hiromichi ; Sajima, Takao ; Kawagoishi, Norio ; Kondo, Eiji ; Honda, Tomohiro. / Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability. Paper presented at 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan.
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AU - Kawagoishi, Norio

AU - Kondo, Eiji

AU - Honda, Tomohiro

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