Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability

Hiroshi Murakami, Akio Katsuki, Hiromichi Onikura, Takao Sajima, Norio Kawagoishi, Eiji Kondo, Tomohiro Honda

Research output: Contribution to conferencePaperpeer-review

Abstract

This paper presents a micro hole measuring system using an optical fiber probe. The probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. In this research, the accuracy and repeatability of such measurement are examined by measuring a roughness standard specimen and a micro hole. The results clarify that the probe has a resolution of 15 nm and the repeatability error for 10 measurements of a roughness standard specimen is within ±0.1 μm in touch trigger mode and ± 0.03 μm in scanning mode.

Original languageEnglish
Publication statusPublished - Dec 1 2009
Event5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
Duration: Dec 2 2009Dec 4 2009

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
Country/TerritoryJapan
CityOsaka
Period12/2/0912/4/09

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

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