Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability

Hiroshi Murakami; Akio Katsuki; Hiromichi Onikura; Takao Sajima; Norio Kawagoishi; Eiji Kondo; Tomohiro Honda

Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability

Hiroshi Murakami, Akio Katsuki, Hiromichi Onikura, Takao Sajima, Norio Kawagoishi, Eiji Kondo, Tomohiro Honda

Manufacturing Process

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper presents a micro hole measuring system using an optical fiber probe. The probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. In this research, the accuracy and repeatability of such measurement are examined by measuring a roughness standard specimen and a micro hole. The results clarify that the probe has a resolution of 15 nm and the repeatability error for 10 measurements of a roughness standard specimen is within ±0.1 μm in touch trigger mode and ± 0.03 μm in scanning mode.

Original language	English
Publication status	Published - Dec 1 2009
Event	5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan Duration: Dec 2 2009 → Dec 4 2009

Other

Other	5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
Country/Territory	Japan
City	Osaka
Period	12/2/09 → 12/4/09

All Science Journal Classification (ASJC) codes

Industrial and Manufacturing Engineering

Cite this

Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability. / Murakami, Hiroshi; Katsuki, Akio; Onikura, Hiromichi; Sajima, Takao; Kawagoishi, Norio; Kondo, Eiji; Honda, Tomohiro.

2009. Paper presented at 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan.

Research output: Contribution to conference › Paper › peer-review

Murakami, Hiroshi ; Katsuki, Akio ; Onikura, Hiromichi ; Sajima, Takao ; Kawagoishi, Norio ; Kondo, Eiji ; Honda, Tomohiro. / Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability. Paper presented at 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan.

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abstract = "This paper presents a micro hole measuring system using an optical fiber probe. The probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. In this research, the accuracy and repeatability of such measurement are examined by measuring a roughness standard specimen and a micro hole. The results clarify that the probe has a resolution of 15 nm and the repeatability error for 10 measurements of a roughness standard specimen is within ±0.1 μm in touch trigger mode and ± 0.03 μm in scanning mode.",

author = "Hiroshi Murakami and Akio Katsuki and Hiromichi Onikura and Takao Sajima and Norio Kawagoishi and Eiji Kondo and Tomohiro Honda",

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AU - Murakami, Hiroshi

AU - Katsuki, Akio

AU - Onikura, Hiromichi

AU - Sajima, Takao

AU - Kawagoishi, Norio

AU - Kondo, Eiji

AU - Honda, Tomohiro

PY - 2009/12/1

Y1 - 2009/12/1

N2 - This paper presents a micro hole measuring system using an optical fiber probe. The probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. In this research, the accuracy and repeatability of such measurement are examined by measuring a roughness standard specimen and a micro hole. The results clarify that the probe has a resolution of 15 nm and the repeatability error for 10 measurements of a roughness standard specimen is within ±0.1 μm in touch trigger mode and ± 0.03 μm in scanning mode.

AB - This paper presents a micro hole measuring system using an optical fiber probe. The probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. In this research, the accuracy and repeatability of such measurement are examined by measuring a roughness standard specimen and a micro hole. The results clarify that the probe has a resolution of 15 nm and the repeatability error for 10 measurements of a roughness standard specimen is within ±0.1 μm in touch trigger mode and ± 0.03 μm in scanning mode.

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M3 - Paper

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T2 - 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009

Y2 - 1 December 2009 through 3 December 2009

ER -

Development of a measuring system for micro hole accuracy using an optical fiber probe-evaluation of measurement repeatability

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