This paper presents a micro hole measuring system using an optical fiber probe. The probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. In this research, the accuracy and repeatability of such measurement are examined by measuring a roughness standard specimen and a micro hole. The results clarify that the probe has a resolution of 15 nm and the repeatability error for 10 measurements of a roughness standard specimen is within ±0.1 μm in touch trigger mode and ± 0.03 μm in scanning mode.
|Publication status||Published - Dec 1 2009|
|Event||5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan|
Duration: Dec 2 2009 → Dec 4 2009
|Other||5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009|
|Period||12/2/09 → 12/4/09|
All Science Journal Classification (ASJC) codes
- Industrial and Manufacturing Engineering