Development of a measuring system for micro hole accuracy using an optical fiber probe: Accuracy evaluation

H. Murakami; A. Katsuki; H. Onikura; Takao Sajima; E. Kondo

Development of a measuring system for micro hole accuracy using an optical fiber probe: Accuracy evaluation

H. Murakami, A. Katsuki, H. Onikura, Takao Sajima, E. Kondo

Manufacturing Process

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents a micro hole measuring system using an optical fiber probe. The system is composed of a fiber probe, two floodlighting fibers and two double-light reception fibers in the X and Y directions. The fiber probe has an optical fiber of 30μm diameter with a ball of 50μm diameter on the end. When the fiber probe comes into contact with a hole surface, it is deflected and this deflection is measured by an optical method. In this research, a prototype of the measuring system is manufactured on trial and its measuring accuracies are examined by using experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 15nm. Also, the utility of this system is confirmed by measuring the shape of a 100μm diameter micro hole.

Original language	English
Title of host publication	Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
Publisher	euspen
Pages	215-218
Number of pages	4
Volume	2
ISBN (Electronic)	9780955308260
Publication status	Published - Jan 1 2009
Event	9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain Duration: Jun 2 2009 → Jun 5 2009

Other

Other	9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
Country/Territory	Spain
City	San Sebastian
Period	6/2/09 → 6/5/09

All Science Journal Classification (ASJC) codes

Industrial and Manufacturing Engineering
Instrumentation
Mechanical Engineering
Materials Science(all)
Environmental Engineering

Cite this

Development of a measuring system for micro hole accuracy using an optical fiber probe: Accuracy evaluation. / Murakami, H.; Katsuki, A.; Onikura, H. et al.
Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. Vol. 2 euspen, 2009. p. 215-218.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Murakami, H, Katsuki, A, Onikura, H, Sajima, T & Kondo, E 2009, Development of a measuring system for micro hole accuracy using an optical fiber probe: Accuracy evaluation. in Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. vol. 2, euspen, pp. 215-218, 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009, San Sebastian, Spain, 6/2/09.

@inproceedings{b594174fc717412cbfe800599ff6f741,

title = "Development of a measuring system for micro hole accuracy using an optical fiber probe: Accuracy evaluation",

abstract = "This paper presents a micro hole measuring system using an optical fiber probe. The system is composed of a fiber probe, two floodlighting fibers and two double-light reception fibers in the X and Y directions. The fiber probe has an optical fiber of 30μm diameter with a ball of 50μm diameter on the end. When the fiber probe comes into contact with a hole surface, it is deflected and this deflection is measured by an optical method. In this research, a prototype of the measuring system is manufactured on trial and its measuring accuracies are examined by using experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 15nm. Also, the utility of this system is confirmed by measuring the shape of a 100μm diameter micro hole.",

author = "H. Murakami and A. Katsuki and H. Onikura and Takao Sajima and E. Kondo",

year = "2009",

month = jan,

day = "1",

language = "English",

volume = "2",

pages = "215--218",

booktitle = "Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009",

publisher = "euspen",

note = "9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 ; Conference date: 02-06-2009 Through 05-06-2009",

}

TY - GEN

T1 - Development of a measuring system for micro hole accuracy using an optical fiber probe

T2 - 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009

AU - Murakami, H.

AU - Katsuki, A.

AU - Onikura, H.

AU - Sajima, Takao

AU - Kondo, E.

PY - 2009/1/1

Y1 - 2009/1/1

N2 - This paper presents a micro hole measuring system using an optical fiber probe. The system is composed of a fiber probe, two floodlighting fibers and two double-light reception fibers in the X and Y directions. The fiber probe has an optical fiber of 30μm diameter with a ball of 50μm diameter on the end. When the fiber probe comes into contact with a hole surface, it is deflected and this deflection is measured by an optical method. In this research, a prototype of the measuring system is manufactured on trial and its measuring accuracies are examined by using experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 15nm. Also, the utility of this system is confirmed by measuring the shape of a 100μm diameter micro hole.

AB - This paper presents a micro hole measuring system using an optical fiber probe. The system is composed of a fiber probe, two floodlighting fibers and two double-light reception fibers in the X and Y directions. The fiber probe has an optical fiber of 30μm diameter with a ball of 50μm diameter on the end. When the fiber probe comes into contact with a hole surface, it is deflected and this deflection is measured by an optical method. In this research, a prototype of the measuring system is manufactured on trial and its measuring accuracies are examined by using experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 15nm. Also, the utility of this system is confirmed by measuring the shape of a 100μm diameter micro hole.

UR - http://www.scopus.com/inward/record.url?scp=84908217693&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84908217693&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84908217693

VL - 2

SP - 215

EP - 218

BT - Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009

PB - euspen

Y2 - 2 June 2009 through 5 June 2009

ER -

Development of a measuring system for micro hole accuracy using an optical fiber probe: Accuracy evaluation

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All Science Journal Classification (ASJC) codes

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