Development of a measuring system for micro hole accuracy using an optical fiber probe: Accuracy evaluation

H. Murakami, A. Katsuki, H. Onikura, Takao Sajima, E. Kondo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a micro hole measuring system using an optical fiber probe. The system is composed of a fiber probe, two floodlighting fibers and two double-light reception fibers in the X and Y directions. The fiber probe has an optical fiber of 30μm diameter with a ball of 50μm diameter on the end. When the fiber probe comes into contact with a hole surface, it is deflected and this deflection is measured by an optical method. In this research, a prototype of the measuring system is manufactured on trial and its measuring accuracies are examined by using experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 15nm. Also, the utility of this system is confirmed by measuring the shape of a 100μm diameter micro hole.

Original languageEnglish
Title of host publicationProceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
Publishereuspen
Pages215-218
Number of pages4
Volume2
ISBN (Electronic)9780955308260
Publication statusPublished - Jan 1 2009
Event9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain
Duration: Jun 2 2009Jun 5 2009

Other

Other9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
CountrySpain
CitySan Sebastian
Period6/2/096/5/09

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Instrumentation
  • Mechanical Engineering
  • Materials Science(all)
  • Environmental Engineering

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