Abstract
We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.
| Original language | English |
|---|---|
| Title of host publication | 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 |
| Pages | 119-120 |
| Number of pages | 2 |
| DOIs | |
| Publication status | Published - 2009 |
| Event | 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States Duration: Aug 17 2009 → Aug 20 2009 |
Other
| Other | 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 |
|---|---|
| Country | United States |
| City | Clearwater, FL |
| Period | 8/17/09 → 8/20/09 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
Cite this
Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes. / Inokuchi, M.; Ando, H.; Kinosita, M.; Akase, K.; Higurashi, Eiji; Sawada, Renshi.
2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 119-120 5338576.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes
AU - Inokuchi, M.
AU - Ando, H.
AU - Kinosita, M.
AU - Akase, K.
AU - Higurashi, Eiji
AU - Sawada, Renshi
PY - 2009
Y1 - 2009
N2 - We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.
AB - We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.
UR - http://www.scopus.com/inward/record.url?scp=71749102498&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=71749102498&partnerID=8YFLogxK
U2 - 10.1109/OMEMS.2009.5338576
DO - 10.1109/OMEMS.2009.5338576
M3 - Conference contribution
AN - SCOPUS:71749102498
SN - 9781424423828
SP - 119
EP - 120
BT - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
ER -