Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes

M. Inokuchi, H. Ando, M. Kinosita, K. Akase, Eiji Higurashi, Renshi Sawada

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    5 Citations (Scopus)

    Abstract

    We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.

    Original languageEnglish
    Title of host publication2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
    Pages119-120
    Number of pages2
    DOIs
    Publication statusPublished - 2009
    Event2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States
    Duration: Aug 17 2009Aug 20 2009

    Other

    Other2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
    CountryUnited States
    CityClearwater, FL
    Period8/17/098/20/09

    All Science Journal Classification (ASJC) codes

    • Hardware and Architecture
    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

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