Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes

M. Inokuchi; H. Ando; M. Kinosita; K. Akase; Eiji Higurashi; Renshi Sawada

doi:10.1109/OMEMS.2009.5338576

Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes

M. Inokuchi, H. Ando, M. Kinosita, K. Akase, Eiji Higurashi, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.

Original language	English
Title of host publication	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages	119-120
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2009.5338576
Publication status	Published - 2009
Event	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States Duration: Aug 17 2009 → Aug 20 2009

Other

Other	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Country/Territory	United States
City	Clearwater, FL
Period	8/17/09 → 8/20/09

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

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10.1109/OMEMS.2009.5338576

Cite this

Inokuchi, M, Ando, H, Kinosita, M, Akase, K, Higurashi, E & Sawada, R 2009, Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes. in 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009., 5338576, pp. 119-120, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, Clearwater, FL, United States, 8/17/09. https://doi.org/10.1109/OMEMS.2009.5338576

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author = "M. Inokuchi and H. Ando and M. Kinosita and K. Akase and Eiji Higurashi and Renshi Sawada",

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AU - Higurashi, Eiji

AU - Sawada, Renshi

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Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes

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