Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes

M. Inokuchi, H. Ando, M. Kinosita, K. Akase, Eiji Higurashi, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.

Original languageEnglish
Title of host publication2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages119-120
Number of pages2
DOIs
Publication statusPublished - 2009
Event2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States
Duration: Aug 17 2009Aug 20 2009

Other

Other2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
CountryUnited States
CityClearwater, FL
Period8/17/098/20/09

Fingerprint

Photodiodes
Sensors
Surface emitting lasers
Mirrors

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Inokuchi, M., Ando, H., Kinosita, M., Akase, K., Higurashi, E., & Sawada, R. (2009). Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 (pp. 119-120). [5338576] https://doi.org/10.1109/OMEMS.2009.5338576

Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes. / Inokuchi, M.; Ando, H.; Kinosita, M.; Akase, K.; Higurashi, Eiji; Sawada, Renshi.

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 119-120 5338576.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Inokuchi, M, Ando, H, Kinosita, M, Akase, K, Higurashi, E & Sawada, R 2009, Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes. in 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009., 5338576, pp. 119-120, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, Clearwater, FL, United States, 8/17/09. https://doi.org/10.1109/OMEMS.2009.5338576
Inokuchi M, Ando H, Kinosita M, Akase K, Higurashi E, Sawada R. Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 119-120. 5338576 https://doi.org/10.1109/OMEMS.2009.5338576
Inokuchi, M. ; Ando, H. ; Kinosita, M. ; Akase, K. ; Higurashi, Eiji ; Sawada, Renshi. / Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes. 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. pp. 119-120
@inproceedings{b6accfd18486451b8c641bc0058f056d,
title = "Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes",
abstract = "We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.",
author = "M. Inokuchi and H. Ando and M. Kinosita and K. Akase and Eiji Higurashi and Renshi Sawada",
year = "2009",
doi = "10.1109/OMEMS.2009.5338576",
language = "English",
isbn = "9781424423828",
pages = "119--120",
booktitle = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

}

TY - GEN

T1 - Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes

AU - Inokuchi, M.

AU - Ando, H.

AU - Kinosita, M.

AU - Akase, K.

AU - Higurashi, Eiji

AU - Sawada, Renshi

PY - 2009

Y1 - 2009

N2 - We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.

AB - We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.

UR - http://www.scopus.com/inward/record.url?scp=71749102498&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=71749102498&partnerID=8YFLogxK

U2 - 10.1109/OMEMS.2009.5338576

DO - 10.1109/OMEMS.2009.5338576

M3 - Conference contribution

AN - SCOPUS:71749102498

SN - 9781424423828

SP - 119

EP - 120

BT - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

ER -