Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes

M. Inokuchi, H. Ando, M. Kinosita, K. Akase, Eiji Higurashi, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.

Original languageEnglish
Title of host publication2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages119-120
Number of pages2
DOIs
Publication statusPublished - 2009
Event2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States
Duration: Aug 17 2009Aug 20 2009

Other

Other2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
CountryUnited States
CityClearwater, FL
Period8/17/098/20/09

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Inokuchi, M., Ando, H., Kinosita, M., Akase, K., Higurashi, E., & Sawada, R. (2009). Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 (pp. 119-120). [5338576] https://doi.org/10.1109/OMEMS.2009.5338576