Abstract
We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.
| Original language | English |
|---|---|
| Title of host publication | 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 |
| Pages | 119-120 |
| Number of pages | 2 |
| DOIs | |
| Publication status | Published - 2009 |
| Event | 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States Duration: Aug 17 2009 → Aug 20 2009 |
Other
| Other | 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 |
|---|---|
| Country | United States |
| City | Clearwater, FL |
| Period | 8/17/09 → 8/20/09 |
All Science Journal Classification (ASJC) codes
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
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Cite this
Inokuchi, M., Ando, H., Kinosita, M., Akase, K., Higurashi, E., & Sawada, R. (2009). Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 (pp. 119-120). [5338576] https://doi.org/10.1109/OMEMS.2009.5338576