Development of a micro hole measuring system using an optical fiber probe (1st report) - Optical analysis and accuracy evaluation

Hiroshi Murakami, Akio Katsuki, Hiromichi Onikura, Takao Sajima, Eiji Kondo

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

This paper presents a micro hole measuring system using an optical fiber probe. The system is composed of a fiber probe, two floodlighting fibers and two double-light reception fibers in the X and Y directions. The fiber probe has an optical fiber of 30μm diameter with a ball of 50μm diameter on the end. When the fiber probe contacts a hole surface, it is deflected and this deflection is measured by an optical method. In this research, the design parameters of optical system are optimized by using ray tracing, and a prototype of the measuring system is manufactured on trial to verify the simulation results. Then, its measuring accuracies are examined by using the basic experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 15nm.

Original languageEnglish
Pages (from-to)1476-1481
Number of pages6
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume75
Issue number12
DOIs
Publication statusPublished - Dec 2009

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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