Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror

S. Matsuyama, T. Wakioka, H. Mimura, T. Kimura, N. Kidani, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

To realize achromatic full-field hard X-ray microscopy with a resolution better than 100 nm, we studied an imaging system consisting of an elliptical mirror and a hyperbolic mirror. The figure accuracies of the elliptical and hyperbolic mirrors required to obtain diffraction-limited resolution were investigated using a wave-optical simulator, and then elliptical and hyperbolic mirrors were precisely fabricated, following the criterion of the figure accuracies. Experiments to form a demagnified image of a one-dimensional slit installed 45 m upstream were conducted using the imaging system at an X-ray energy of 11.5 keV at BL29XUL of SPring-8. The system could form a demagnified image with the best resolution of 78 nm. In addition, the field of view to obtain a resolution better than 200 nm was 4.2 micron.

Original languageEnglish
Title of host publicationAdvances in X-Ray/EUV Optics and Components V
DOIs
Publication statusPublished - Dec 13 2010
Externally publishedYes
EventAdvances in X-Ray/EUV Optics and Components V - San Diego, CA, United States
Duration: Aug 2 2010Aug 3 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7802
ISSN (Print)0277-786X

Other

OtherAdvances in X-Ray/EUV Optics and Components V
CountryUnited States
CitySan Diego, CA
Period8/2/108/3/10

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Matsuyama, S., Wakioka, T., Mimura, H., Kimura, T., Kidani, N., Sano, Y., Nishino, Y., Tamasaku, K., Yabashi, M., Ishikawa, T., & Yamauchi, K. (2010). Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror. In Advances in X-Ray/EUV Optics and Components V [780202] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7802). https://doi.org/10.1117/12.860405