Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements

Toshihiro Takeshita, Takuma Iwasaki, Kota Harisaki, Hideyuki Ando, Eiji Higurashi, Renshi Sawada

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We fabricated a mechanical stage driven by a piezoelectric actuator and built in a microdisplacement sensor, which is used to decrease the effect of hysteresis and creep in the piezoelectric actuator. The displacement sensor consists of a vertical-cavity surface-emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PDs), a frame, and a cover glass. The size of the sensor chip is 3.0 mm by 3.0 mm with a thickness of 0.7 mm. The maximum variation in the position of the mechanical stage caused by hysteresis is 7.5 μm without control when the movement range of the mechanical stage is 84.4 μm. By controlling the applied voltage using our microdisplacement sensor, we reduce the effect of the hysteresis, and the variation in position decreased to 1.9 μm.

Original languageEnglish
Pages (from-to)547-557
Number of pages11
JournalSensors and Materials
Volume26
Issue number8
Publication statusPublished - Jan 1 2014

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Calibration
Hysteresis
piezoelectric actuators
Piezoelectric actuators
sensors
hysteresis
Sensors
Surface emitting lasers
Photodiodes
surface emitting lasers
photodiodes
Creep
chips
Glass
cavities
glass
Electric potential
electric potential

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Materials Science(all)

Cite this

Takeshita, T., Iwasaki, T., Harisaki, K., Ando, H., Higurashi, E., & Sawada, R. (2014). Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements. Sensors and Materials, 26(8), 547-557.

Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements. / Takeshita, Toshihiro; Iwasaki, Takuma; Harisaki, Kota; Ando, Hideyuki; Higurashi, Eiji; Sawada, Renshi.

In: Sensors and Materials, Vol. 26, No. 8, 01.01.2014, p. 547-557.

Research output: Contribution to journalArticle

Takeshita, T, Iwasaki, T, Harisaki, K, Ando, H, Higurashi, E & Sawada, R 2014, 'Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements', Sensors and Materials, vol. 26, no. 8, pp. 547-557.
Takeshita T, Iwasaki T, Harisaki K, Ando H, Higurashi E, Sawada R. Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements. Sensors and Materials. 2014 Jan 1;26(8):547-557.
Takeshita, Toshihiro ; Iwasaki, Takuma ; Harisaki, Kota ; Ando, Hideyuki ; Higurashi, Eiji ; Sawada, Renshi. / Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements. In: Sensors and Materials. 2014 ; Vol. 26, No. 8. pp. 547-557.
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