Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements

Toshihiro Takeshita, Takuma Iwasaki, Kota Harisaki, Hideyuki Ando, Eiji Higurashi, Renshi Sawada

Research output: Contribution to journalArticle

2 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy