Development of a Sharp-Tipped L-Shaped Stylus for Measurement of Nanoscale Sidewall Features

Kosuke Uchiyama, Hiroshi Murakami, Akio Katsuki, Takao Sajima

Research output: Contribution to journalArticlepeer-review

Abstract

This paper presents a system for measuring nanoscale sidewall features using an L-shaped stylus with a sharp tip. By sharpening the tip of the stylus to the nanometer scale, it is possible to measure nanoscale sidewall features. The stylus shaft is deflected when the sharpened stylus tip contacts the measured sur-face, and this deflection is measured optically. In this study, we develop the fabrication method of an L-shaped sharpened stylus 20 µm in diameter and 4 mm in length by etching, CO2 laser processing, and bonding. Then, the measurement accuracy and repeatability are examined by measuring V-grooves with nanoscale features. The results clarify that the pitch is approximately 0.3 µm, which is almost the same as the value measured using the photographic image, but the depths measured by the styli fabricated by CO2 laser processing and bonding are approximately 0.15 and 0.07 µm, respectively. The depth measured by the stylus fabricated by bonding is smaller than that measured from the image (approximately 0.16 µm), presumably because of the morphological filter. The maximum repeatability errors for 10 measurements using the styli fabricated by CO2 laser processing and bonding are within ±0.056 and ±0.022 µm in scanning mode, respectively. It is also confirmed that the stylus tip exhibits minimal wear even after 500 mea-surements.

Original languageEnglish
Pages (from-to)489-496
Number of pages8
JournalInternational Journal of Automation Technology
Volume16
Issue number4
DOIs
Publication statusPublished - Jul 2022

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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