Development of a system for 3-d micro metrology using an optical fiber probe

Hiroshi Murakami, Akio Katsuki, Hiromichi Onikura, Takao Sajima, Norio Kawagoishi, Eiji Kondo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationProceedings - ASPE 2010 Annual Meeting
Pages69-72
Number of pages4
Publication statusPublished - Dec 1 2010
Event25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 - Atlanta, GA, United States
Duration: Oct 31 2010Nov 4 2010

Publication series

NameProceedings - ASPE 2010 Annual Meeting
Volume50

Other

Other25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010
CountryUnited States
CityAtlanta, GA
Period10/31/1011/4/10

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

Cite this

Murakami, H., Katsuki, A., Onikura, H., Sajima, T., Kawagoishi, N., & Kondo, E. (2010). Development of a system for 3-d micro metrology using an optical fiber probe. In Proceedings - ASPE 2010 Annual Meeting (pp. 69-72). (Proceedings - ASPE 2010 Annual Meeting; Vol. 50).