Development of a system for 3-d micro metrology using an optical fiber probe

Hiroshi Murakami, Akio Katsuki, Hiromichi Onikura, Takao Sajima, Norio Kawagoishi, Eiji Kondo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationProceedings - ASPE 2010 Annual Meeting
Pages69-72
Number of pages4
Publication statusPublished - Dec 1 2010
Event25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 - Atlanta, GA, United States
Duration: Oct 31 2010Nov 4 2010

Publication series

NameProceedings - ASPE 2010 Annual Meeting
Volume50

Other

Other25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010
CountryUnited States
CityAtlanta, GA
Period10/31/1011/4/10

Fingerprint

Optical fibers

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

Cite this

Murakami, H., Katsuki, A., Onikura, H., Sajima, T., Kawagoishi, N., & Kondo, E. (2010). Development of a system for 3-d micro metrology using an optical fiber probe. In Proceedings - ASPE 2010 Annual Meeting (pp. 69-72). (Proceedings - ASPE 2010 Annual Meeting; Vol. 50).

Development of a system for 3-d micro metrology using an optical fiber probe. / Murakami, Hiroshi; Katsuki, Akio; Onikura, Hiromichi; Sajima, Takao; Kawagoishi, Norio; Kondo, Eiji.

Proceedings - ASPE 2010 Annual Meeting. 2010. p. 69-72 (Proceedings - ASPE 2010 Annual Meeting; Vol. 50).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Murakami, H, Katsuki, A, Onikura, H, Sajima, T, Kawagoishi, N & Kondo, E 2010, Development of a system for 3-d micro metrology using an optical fiber probe. in Proceedings - ASPE 2010 Annual Meeting. Proceedings - ASPE 2010 Annual Meeting, vol. 50, pp. 69-72, 25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010, Atlanta, GA, United States, 10/31/10.
Murakami H, Katsuki A, Onikura H, Sajima T, Kawagoishi N, Kondo E. Development of a system for 3-d micro metrology using an optical fiber probe. In Proceedings - ASPE 2010 Annual Meeting. 2010. p. 69-72. (Proceedings - ASPE 2010 Annual Meeting).
Murakami, Hiroshi ; Katsuki, Akio ; Onikura, Hiromichi ; Sajima, Takao ; Kawagoishi, Norio ; Kondo, Eiji. / Development of a system for 3-d micro metrology using an optical fiber probe. Proceedings - ASPE 2010 Annual Meeting. 2010. pp. 69-72 (Proceedings - ASPE 2010 Annual Meeting).
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