Development of a system for 3-D micro metrology using an ultra-small-diameter optical fiber probe-optical analysis and evaluative experiment using the 0.4 μm diameter stylus shaft

Hiroshi Murakami; Akio Katsuki; Takao Sajima; Narumi Tokuoh; Mitsuyoshi Fukuda

Development of a system for 3-D micro metrology using an ultra-small-diameter optical fiber probe-optical analysis and evaluative experiment using the 0.4 μm diameter stylus shaft

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Narumi Tokuoh, Mitsuyoshi Fukuda

Manufacturing Process

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

This paper has described a system for measuring 3-D micro structures using an optical fiber probe. For this research, the stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique. Further, the minimum diameter of the available stylus shaft was examined using an FDTD method. Finally, the stylus characteristic and the measurement resolution were examined. As a result, it was shown by an FDTD simulation that the minimum diameter of the available stylus shaft was about 0.2 μm for a laser diode with a 375 nm wavelength. In addition, the stylus shaft with a diameter of 0.4 μm could be manufactured, and the resolution of the measurement system using this shaft was found to be approximately 5 nm.

Original language	English
Title of host publication	Proceedings - ASPE 2014 Annual Meeting
Publisher	American Society for Precision Engineering, ASPE
Pages	63-66
Number of pages	4
ISBN (Electronic)	9781887706667
Publication status	Published - 2014
Event	29th Annual Meeting of the American Society for Precision Engineering, ASPE 2014 - Boston, United States Duration: Nov 9 2014 → Nov 14 2014

Publication series

Name	Proceedings - ASPE 2014 Annual Meeting

Other

Other	29th Annual Meeting of the American Society for Precision Engineering, ASPE 2014
Country/Territory	United States
City	Boston
Period	11/9/14 → 11/14/14

All Science Journal Classification (ASJC) codes

Engineering(all)

Cite this

Murakami, H., Katsuki, A., Sajima, T., Tokuoh, N., & Fukuda, M. (2014). Development of a system for 3-D micro metrology using an ultra-small-diameter optical fiber probe-optical analysis and evaluative experiment using the 0.4 μm diameter stylus shaft. In Proceedings - ASPE 2014 Annual Meeting (pp. 63-66). (Proceedings - ASPE 2014 Annual Meeting). American Society for Precision Engineering, ASPE.

Development of a system for 3-D micro metrology using an ultra-small-diameter optical fiber probe-optical analysis and evaluative experiment using the 0.4 μm diameter stylus shaft. / Murakami, Hiroshi; Katsuki, Akio; Sajima, Takao et al.
Proceedings - ASPE 2014 Annual Meeting. American Society for Precision Engineering, ASPE, 2014. p. 63-66 (Proceedings - ASPE 2014 Annual Meeting).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Murakami, H, Katsuki, A, Sajima, T, Tokuoh, N & Fukuda, M 2014, Development of a system for 3-D micro metrology using an ultra-small-diameter optical fiber probe-optical analysis and evaluative experiment using the 0.4 μm diameter stylus shaft. in Proceedings - ASPE 2014 Annual Meeting. Proceedings - ASPE 2014 Annual Meeting, American Society for Precision Engineering, ASPE, pp. 63-66, 29th Annual Meeting of the American Society for Precision Engineering, ASPE 2014, Boston, United States, 11/9/14.

Murakami H, Katsuki A, Sajima T, Tokuoh N, Fukuda M. Development of a system for 3-D micro metrology using an ultra-small-diameter optical fiber probe-optical analysis and evaluative experiment using the 0.4 μm diameter stylus shaft. In Proceedings - ASPE 2014 Annual Meeting. American Society for Precision Engineering, ASPE. 2014. p. 63-66. (Proceedings - ASPE 2014 Annual Meeting).

Murakami, Hiroshi ; Katsuki, Akio ; Sajima, Takao et al. / Development of a system for 3-D micro metrology using an ultra-small-diameter optical fiber probe-optical analysis and evaluative experiment using the 0.4 μm diameter stylus shaft. Proceedings - ASPE 2014 Annual Meeting. American Society for Precision Engineering, ASPE, 2014. pp. 63-66 (Proceedings - ASPE 2014 Annual Meeting).

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abstract = "This paper has described a system for measuring 3-D micro structures using an optical fiber probe. For this research, the stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique. Further, the minimum diameter of the available stylus shaft was examined using an FDTD method. Finally, the stylus characteristic and the measurement resolution were examined. As a result, it was shown by an FDTD simulation that the minimum diameter of the available stylus shaft was about 0.2 μm for a laser diode with a 375 nm wavelength. In addition, the stylus shaft with a diameter of 0.4 μm could be manufactured, and the resolution of the measurement system using this shaft was found to be approximately 5 nm.",

author = "Hiroshi Murakami and Akio Katsuki and Takao Sajima and Narumi Tokuoh and Mitsuyoshi Fukuda",

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AU - Sajima, Takao

AU - Tokuoh, Narumi

AU - Fukuda, Mitsuyoshi

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AB - This paper has described a system for measuring 3-D micro structures using an optical fiber probe. For this research, the stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique. Further, the minimum diameter of the available stylus shaft was examined using an FDTD method. Finally, the stylus characteristic and the measurement resolution were examined. As a result, it was shown by an FDTD simulation that the minimum diameter of the available stylus shaft was about 0.2 μm for a laser diode with a 375 nm wavelength. In addition, the stylus shaft with a diameter of 0.4 μm could be manufactured, and the resolution of the measurement system using this shaft was found to be approximately 5 nm.

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Development of a system for 3-D micro metrology using an ultra-small-diameter optical fiber probe-optical analysis and evaluative experiment using the 0.4 μm diameter stylus shaft

Abstract

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Other

All Science Journal Classification (ASJC) codes

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