Development of a system for 3-D micro metrology using an ultra-small-diameter optical fiber probe-optical analysis and evaluative experiment using the 0.4 μm diameter stylus shaft

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Narumi Tokuoh, Mitsuyoshi Fukuda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

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Engineering & Materials Science