Nano-structured and tin-based targets have been fabricated by the pulsed-laser ablation method, in order to develop efficient and debris-free targets for the laser-produced plasma extreme ultraviolet (EUV) light source at 13.5 nm. Characteristic spectra that have the radiation peak around 13.5 nm were obtained from CO2 laser produced plasma using the films as a target. A nano-structured target produced EUV light as intense as a bulk target and a narrower line spectrum at 13.5 nm than a bulk target.
|Number of pages||3|
|Journal||Applied Physics A: Materials Science and Processing|
|Publication status||Published - Jan 1 2004|
All Science Journal Classification (ASJC) codes
- Materials Science(all)