Development of a TES microcalorimeter with a mushroom shaped absorber deposited on an Insulating Layer in an Overhang Region

K. Maehata, N. Iyomoto, T. Yasumune, M. Maeda, S. Matsumura, T. Hara, K. Mitsuda, N. Yamasaki, K. Tanaka

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A 3×3+1 superconducting transition-edge sensor (TES) microcalorimeter- array has been developed for the energy dispersive spectrometer performed on a transmission electron microscope. For increasing sensitive area, each TES microcalorimeter consisted of a Ti/Au bilayer and a mushroom shaped absorber. The mushroom shaped absorber is made from a Au layer of 0.5 μm thick. Geometrical dimensions of the surface area of the TES and the absorber are 350 μm × 350 μm and 330 μm × 330 μm, respectively. The absorber stem of 150 μm × 150 μm in the cross sectional area is deposited on the center of the TES surface. A Ta2O5 insulating layer of 0.1 μm thick is inserted between the overhang layer of the absorber and the TES surface. One pixel of the TES microcalorimeter was operated for detecting X-ray photons emitted from an 55Fe source.

Original languageEnglish
Pages (from-to)226-231
Number of pages6
JournalJournal of Low Temperature Physics
Issue number3-4
Publication statusPublished - Jun 1 2012


All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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