TY - JOUR
T1 - Development of a TES microcalorimeter with a mushroom shaped absorber deposited on an Insulating Layer in an Overhang Region
AU - Maehata, K.
AU - Iyomoto, N.
AU - Yasumune, T.
AU - Maeda, M.
AU - Matsumura, S.
AU - Hara, T.
AU - Mitsuda, K.
AU - Yamasaki, N.
AU - Tanaka, K.
PY - 2012/6/1
Y1 - 2012/6/1
N2 - A 3×3+1 superconducting transition-edge sensor (TES) microcalorimeter- array has been developed for the energy dispersive spectrometer performed on a transmission electron microscope. For increasing sensitive area, each TES microcalorimeter consisted of a Ti/Au bilayer and a mushroom shaped absorber. The mushroom shaped absorber is made from a Au layer of 0.5 μm thick. Geometrical dimensions of the surface area of the TES and the absorber are 350 μm × 350 μm and 330 μm × 330 μm, respectively. The absorber stem of 150 μm × 150 μm in the cross sectional area is deposited on the center of the TES surface. A Ta2O5 insulating layer of 0.1 μm thick is inserted between the overhang layer of the absorber and the TES surface. One pixel of the TES microcalorimeter was operated for detecting X-ray photons emitted from an 55Fe source.
AB - A 3×3+1 superconducting transition-edge sensor (TES) microcalorimeter- array has been developed for the energy dispersive spectrometer performed on a transmission electron microscope. For increasing sensitive area, each TES microcalorimeter consisted of a Ti/Au bilayer and a mushroom shaped absorber. The mushroom shaped absorber is made from a Au layer of 0.5 μm thick. Geometrical dimensions of the surface area of the TES and the absorber are 350 μm × 350 μm and 330 μm × 330 μm, respectively. The absorber stem of 150 μm × 150 μm in the cross sectional area is deposited on the center of the TES surface. A Ta2O5 insulating layer of 0.1 μm thick is inserted between the overhang layer of the absorber and the TES surface. One pixel of the TES microcalorimeter was operated for detecting X-ray photons emitted from an 55Fe source.
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U2 - 10.1007/s10909-012-0469-y
DO - 10.1007/s10909-012-0469-y
M3 - Article
AN - SCOPUS:84863723415
VL - 167
SP - 226
EP - 231
JO - Journal of Low Temperature Physics
JF - Journal of Low Temperature Physics
SN - 0022-2291
IS - 3-4
ER -