A 3×3+1 superconducting transition-edge sensor (TES) microcalorimeter- array has been developed for the energy dispersive spectrometer performed on a transmission electron microscope. For increasing sensitive area, each TES microcalorimeter consisted of a Ti/Au bilayer and a mushroom shaped absorber. The mushroom shaped absorber is made from a Au layer of 0.5 μm thick. Geometrical dimensions of the surface area of the TES and the absorber are 350 μm × 350 μm and 330 μm × 330 μm, respectively. The absorber stem of 150 μm × 150 μm in the cross sectional area is deposited on the center of the TES surface. A Ta2O5 insulating layer of 0.1 μm thick is inserted between the overhang layer of the absorber and the TES surface. One pixel of the TES microcalorimeter was operated for detecting X-ray photons emitted from an 55Fe source.
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Materials Science(all)
- Condensed Matter Physics