@inproceedings{5fc5d5da39f5456eaedadb963cb162e9,
title = "Development of adaptive mirror for wavefront correction of hard x-ray nanobeam",
abstract = "We present the development of a phase compensator for wavefront control of X-rays. The optical device is a 150 mm-long total reflection mirror, the shape of which can be curved by adjusting the bias voltages of 36 piezoelectric ceramic plates attached to the mirror. The mirror surface was smoothed and made flat by elastic emission machining. To achieve a high degree of the accuracy in the controllability of a curved line, a Fizeau interferometer is placed in front of the mirror surface to monitor its shape in the experiment. We will apply this device to the optical system for the realization of sub-10-nm hard X-ray focusing.",
author = "Takashi Kimura and Soichiro Handa and Hidekazu Mimura and Hirokatsu Yumoto and Daisuke Yamakawa and Satoshi Matsuyama and Yasuhisa Sano and Kenji Tamasaku and Yoshinori Nishino and Makina Yabashi and Tetsuya Ishikawa and Kazuto Yamauchi",
year = "2008",
doi = "10.1117/12.796029",
language = "English",
isbn = "9780819472977",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Advances in X-Ray/EUV Optics and Components III",
note = "Advances in X-Ray/EUV Optics and Components III ; Conference date: 11-08-2008 Through 13-08-2008",
}