Development of an AC electric field-applied tribochemical polishing technology to promote high-efficiency polishing for glass substrates (image analysis of dynamical slurry behaviours and polishing characteristics under AC electric field)

Hiroshi Ikeda, Yoichi Akagami, Michio Uneda, Osamu Ohnishi, Syuhei Kurokawa, Toshiro K. Doi

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Engineering & Materials Science