TY - GEN
T1 - Development of an energy dispersive spectrometer for a transmission electron microscope utilizing a TES microcalorimeter array
AU - Tanaka, Keiichi
AU - Mitsuda, Kazuhisa
AU - Hara, Tom
AU - Maehata, Keisuke
AU - Yamasaki, Noriko Y.
AU - Odawara, Akikazu
AU - Nagata, Atsushi
AU - Watanabe, Katsuaki
AU - Takei, Yoh
PY - 2009
Y1 - 2009
N2 - A high-energy-resolution energy dispersive spectrometer (EDS) utilizing a TES (transition edge sensor) microcalorimeter array is developed for a transmission electron microscope (TEM). The goals of the development are (1) an energy range of 0.3 - 10 keV, (2) an energy resolution of FWHM < 10 eV, (3) a maximum counting rate of 3 kcps, and (4) a cryogen-free cooling system. We adopted a dilution refrigerator (DR) pre-cooled by a Gifford-McMahon (GM) refrigerator to cool the TES microcalorimeter to -∼ 100 mK. In order to avoid micro phonics of GM fridge to propagate to the TEM, pressurized He gas is circulated between the DR and the GM to reject heat from the DR. The GM is mechanically well isolated from the TEM. In oder to obtain 3 kcps counting rate, we utilize a ten pixel TES array and read out the signals in parallel wtih ten analog signal channels from cryogenic to room temperature electronics. One of the pixels can be always irradiated by a radio isotope for energy calibration. As the first step, we have attached a single pixel TES system cooled by the cryogen-free cooling system to the TEM and obtained an energy resolution of 8 eV at 1.8 keV without degrading the spatial resolution of the TEM at a 2 Å level. A ten pixel TES system is also being developed from the front-end detector assembly to the room temperature digital electronics. We describe the signal processing system and packaging of the detector assembly.
AB - A high-energy-resolution energy dispersive spectrometer (EDS) utilizing a TES (transition edge sensor) microcalorimeter array is developed for a transmission electron microscope (TEM). The goals of the development are (1) an energy range of 0.3 - 10 keV, (2) an energy resolution of FWHM < 10 eV, (3) a maximum counting rate of 3 kcps, and (4) a cryogen-free cooling system. We adopted a dilution refrigerator (DR) pre-cooled by a Gifford-McMahon (GM) refrigerator to cool the TES microcalorimeter to -∼ 100 mK. In order to avoid micro phonics of GM fridge to propagate to the TEM, pressurized He gas is circulated between the DR and the GM to reject heat from the DR. The GM is mechanically well isolated from the TEM. In oder to obtain 3 kcps counting rate, we utilize a ten pixel TES array and read out the signals in parallel wtih ten analog signal channels from cryogenic to room temperature electronics. One of the pixels can be always irradiated by a radio isotope for energy calibration. As the first step, we have attached a single pixel TES system cooled by the cryogen-free cooling system to the TEM and obtained an energy resolution of 8 eV at 1.8 keV without degrading the spatial resolution of the TEM at a 2 Å level. A ten pixel TES system is also being developed from the front-end detector assembly to the room temperature digital electronics. We describe the signal processing system and packaging of the detector assembly.
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U2 - 10.1063/1.3292441
DO - 10.1063/1.3292441
M3 - Conference contribution
AN - SCOPUS:74349101482
SN - 9780735407510
T3 - AIP Conference Proceedings
SP - 715
EP - 718
BT - Low Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop
T2 - 13th International Workshop on Low Temperature Detectors, LTD-13
Y2 - 20 July 2009 through 24 July 2009
ER -