Development of hard x-ray imaging optics with two pairs of elliptical and hyperbolic mirrors

S. Matsuyama, M. Fujii, T. Wakioka, H. Mimura, S. Handa, Takashi Kimura, Y. Nishino, K. Tamasaku, Y. Makina, T. Ishikawa, K. Yamauchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

To form a magnified hard X-ray image with a 50 nm resolution, we have studied total reflection mirror optics with two pairs of elliptical and hyperbolic mirrors, which is called "Advanced Kirkpatrick-Baez system". A designed optical system has 200x and 300x magnifications in vertical and horizontal directions. Also diffraction limit size in the optical system is 40nm×45nm. We fabricated a pair of elliptical and hyperbolic mirrors for horizontal imaging with a figure accuracy of 2 nm using elastic emission machining (EEM), microstitching interferometry (MSI) and relative-angle-determinable stitching interferometry (RADSI). One-dimensional tests for forming a demagnified image of a slit were carried out at an X-ray energy of 11.5 keV at BL29XUL (EH2) of SPring-8. As a result, a shape beam with a FWHM of 78 nm was observed. This demonstrates that we realized one-dimensional Wolter optics that has a spatial resolution of 78 nm.

Original languageEnglish
Title of host publicationSRI 2009 - The 10th International Conference on Synchrotron Radiation Instrumentation
Pages267-270
Number of pages4
DOIs
Publication statusPublished - Aug 3 2010
Externally publishedYes
Event10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009 - Melbourne, VIC, Australia
Duration: Sep 27 2009Oct 2 2009

Publication series

NameAIP Conference Proceedings
Volume1234
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009
CountryAustralia
CityMelbourne, VIC
Period9/27/0910/2/09

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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    Matsuyama, S., Fujii, M., Wakioka, T., Mimura, H., Handa, S., Kimura, T., Nishino, Y., Tamasaku, K., Makina, Y., Ishikawa, T., & Yamauchi, K. (2010). Development of hard x-ray imaging optics with two pairs of elliptical and hyperbolic mirrors. In SRI 2009 - The 10th International Conference on Synchrotron Radiation Instrumentation (pp. 267-270). (AIP Conference Proceedings; Vol. 1234). https://doi.org/10.1063/1.3463187