Development of high lateral and wide angle resolved hard X-ray photoemission spectroscopy at BL47XU in SPring-8

Eiji Ikenaga, Masaaki Kobata, Hiroyuki Matsuda, Takeharu Sugiyama, Hiroshi Daimon, Keisuke Kobayashi

Research output: Contribution to journalArticlepeer-review

58 Citations (Scopus)

Abstract

In this study, we have realized a high lateral resolution and wide-angle-resolved hard X-ray photoelectron spectroscopy (HAXPES) facility at BL47XU in SPring-8. The system uses Kirkpatrick-Baez focusing mirrors to achieve a beam size of 1.0 μm (horizontal) × 0.98 μm (vertical) at the photon energy of 7.94 keV and a wide-acceptance-angle objective lens installed in front of the electron energy analyzer. The objective lens system, which we had been developed originally and has achieved a total acceptance angle of ±34 with a resolution better than that of an acceptance angle of 1.5. The performance of this system was evaluated through core spectra measurements of a typical multi-layered sample of Ir (8 nm)/HfO2 (2.2 nm)/thickness-graded SiO2 (0-10 nm)/Si(0 0 1).

Original languageEnglish
Pages (from-to)180-187
Number of pages8
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume190
Issue numberPART B
DOIs
Publication statusPublished - Oct 2013
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Radiation
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry

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