Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring

Lan Zhang, Jian Lu, Hironao Okada, Hirofumi Nogami, Toshihiro Itoh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We developed a novel solid rumen pH sensor for long-term cow health condition monitoring. The pH sensor is composed by a sensing electrode with indium tin oxide (ITO) layer and a measuring unit of metal-oxide-semiconductor field-effect transistor (MOSFET). Sensor system can be fabricated with a compact size by getting rid of the reference solution. By MEMS technique, solid pH sensors were fabricated well and given sensors have the measuring sensitivity of > 14 μA/pH. The long-term test with interval experiments have been finished, as the results shown, developed pH sensor has a stable performance for relative long time rumen pH value measurement.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016
EditorsYoshio Mita, Marta Rencz, Benoit Charlot, Peter Schneider, Niels Tas, Pascal Nouet, Francis Pressecq
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509014576
DOIs
Publication statusPublished - Jul 15 2016
Event18th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016 - Budapest, Hungary
Duration: May 30 2016Jun 2 2016

Other

Other18th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016
CountryHungary
CityBudapest
Period5/30/166/2/16

Fingerprint

pH sensors
Field effect transistors
Tin oxides
Indium
Monitoring
Sensors
Condition monitoring
MOSFET devices
MEMS
Health
Electrodes
indium tin oxide
Experiments

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Zhang, L., Lu, J., Okada, H., Nogami, H., & Itoh, T. (2016). Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring. In Y. Mita, M. Rencz, B. Charlot, P. Schneider, N. Tas, P. Nouet, & F. Pressecq (Eds.), Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016 [7514846] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2016.7514846

Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring. / Zhang, Lan; Lu, Jian; Okada, Hironao; Nogami, Hirofumi; Itoh, Toshihiro.

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016. ed. / Yoshio Mita; Marta Rencz; Benoit Charlot; Peter Schneider; Niels Tas; Pascal Nouet; Francis Pressecq. Institute of Electrical and Electronics Engineers Inc., 2016. 7514846.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhang, L, Lu, J, Okada, H, Nogami, H & Itoh, T 2016, Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring. in Y Mita, M Rencz, B Charlot, P Schneider, N Tas, P Nouet & F Pressecq (eds), Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016., 7514846, Institute of Electrical and Electronics Engineers Inc., 18th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016, Budapest, Hungary, 5/30/16. https://doi.org/10.1109/DTIP.2016.7514846
Zhang L, Lu J, Okada H, Nogami H, Itoh T. Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring. In Mita Y, Rencz M, Charlot B, Schneider P, Tas N, Nouet P, Pressecq F, editors, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016. Institute of Electrical and Electronics Engineers Inc. 2016. 7514846 https://doi.org/10.1109/DTIP.2016.7514846
Zhang, Lan ; Lu, Jian ; Okada, Hironao ; Nogami, Hirofumi ; Itoh, Toshihiro. / Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016. editor / Yoshio Mita ; Marta Rencz ; Benoit Charlot ; Peter Schneider ; Niels Tas ; Pascal Nouet ; Francis Pressecq. Institute of Electrical and Electronics Engineers Inc., 2016.
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