Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring

Lan Zhang; Jian Lu; Hironao Okada; Hirofumi Nogami; Toshihiro Itoh

doi:10.1109/DTIP.2016.7514846

Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring

Lan Zhang, Jian Lu, Hironao Okada, Hirofumi Nogami, Toshihiro Itoh

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We developed a novel solid rumen pH sensor for long-term cow health condition monitoring. The pH sensor is composed by a sensing electrode with indium tin oxide (ITO) layer and a measuring unit of metal-oxide-semiconductor field-effect transistor (MOSFET). Sensor system can be fabricated with a compact size by getting rid of the reference solution. By MEMS technique, solid pH sensors were fabricated well and given sensors have the measuring sensitivity of > 14 μA/pH. The long-term test with interval experiments have been finished, as the results shown, developed pH sensor has a stable performance for relative long time rumen pH value measurement.

Original language	English
Title of host publication	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016
Editors	Yoshio Mita, Marta Rencz, Benoit Charlot, Peter Schneider, Niels Tas, Pascal Nouet, Francis Pressecq
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781509014576
DOIs	https://doi.org/10.1109/DTIP.2016.7514846
Publication status	Published - Jul 15 2016
Event	18th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016 - Budapest, Hungary Duration: May 30 2016 → Jun 2 2016

Other

Other	18th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016
Country	Hungary
City	Budapest
Period	5/30/16 → 6/2/16

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Mechanical Engineering

Access to Document

10.1109/DTIP.2016.7514846

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Cite this

Zhang, L., Lu, J., Okada, H., Nogami, H., & Itoh, T. (2016). Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring. In Y. Mita, M. Rencz, B. Charlot, P. Schneider, N. Tas, P. Nouet, & F. Pressecq (Eds.), Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016 [7514846] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2016.7514846

Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring. / Zhang, Lan; Lu, Jian; Okada, Hironao; Nogami, Hirofumi; Itoh, Toshihiro.

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016. ed. / Yoshio Mita; Marta Rencz; Benoit Charlot; Peter Schneider; Niels Tas; Pascal Nouet; Francis Pressecq. Institute of Electrical and Electronics Engineers Inc., 2016. 7514846.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhang, L, Lu, J, Okada, H, Nogami, H & Itoh, T 2016, Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring. in Y Mita, M Rencz, B Charlot, P Schneider, N Tas, P Nouet & F Pressecq (eds), Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016., 7514846, Institute of Electrical and Electronics Engineers Inc., 18th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016, Budapest, Hungary, 5/30/16. https://doi.org/10.1109/DTIP.2016.7514846

Zhang L, Lu J, Okada H, Nogami H, Itoh T. Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring. In Mita Y, Rencz M, Charlot B, Schneider P, Tas N, Nouet P, Pressecq F, editors, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016. Institute of Electrical and Electronics Engineers Inc. 2016. 7514846 https://doi.org/10.1109/DTIP.2016.7514846

Zhang, Lan ; Lu, Jian ; Okada, Hironao ; Nogami, Hirofumi ; Itoh, Toshihiro. / Development of ITO-and FET-based cow rumen sensor for long-term pH value monitoring. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016. editor / Yoshio Mita ; Marta Rencz ; Benoit Charlot ; Peter Schneider ; Niels Tas ; Pascal Nouet ; Francis Pressecq. Institute of Electrical and Electronics Engineers Inc., 2016.

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abstract = "We developed a novel solid rumen pH sensor for long-term cow health condition monitoring. The pH sensor is composed by a sensing electrode with indium tin oxide (ITO) layer and a measuring unit of metal-oxide-semiconductor field-effect transistor (MOSFET). Sensor system can be fabricated with a compact size by getting rid of the reference solution. By MEMS technique, solid pH sensors were fabricated well and given sensors have the measuring sensitivity of > 14 μA/pH. The long-term test with interval experiments have been finished, as the results shown, developed pH sensor has a stable performance for relative long time rumen pH value measurement.",

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AB - We developed a novel solid rumen pH sensor for long-term cow health condition monitoring. The pH sensor is composed by a sensing electrode with indium tin oxide (ITO) layer and a measuring unit of metal-oxide-semiconductor field-effect transistor (MOSFET). Sensor system can be fabricated with a compact size by getting rid of the reference solution. By MEMS technique, solid pH sensors were fabricated well and given sensors have the measuring sensitivity of > 14 μA/pH. The long-term test with interval experiments have been finished, as the results shown, developed pH sensor has a stable performance for relative long time rumen pH value measurement.

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