A medium-energy ion-stimulated desorption spectroscope was combined with a helium ion microscope to develop a microscope for lithium (Li) analysis with high spatial resolution below 10nm. The analysis of Li is based on time-of-flight (TOF) spectroscopy. A clear Li peak was observed in the TOF spectra for the samples containing Li. The capability of the microscope was demonstrated using a LiCoO2/Nb doped SrTiO3 sample. Furthermore, the Li distribution on the sample was successfully observed by measuring the Li+ peak intensity as a function of the helium irradiation position.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)