Development of microscopy for lithium analysis using medium-energy ion-stimulated desorption

Takane Kobayashi, Atsushi Kamoshida, Hideo Akiyama, Ken Watanabe, Tsuyoshi Ohnishi, Kazunori Takada, Taku T. Suzuki

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Abstract

A medium-energy ion-stimulated desorption spectroscope was combined with a helium ion microscope to develop a microscope for lithium (Li) analysis with high spatial resolution below 10nm. The analysis of Li is based on time-of-flight (TOF) spectroscopy. A clear Li peak was observed in the TOF spectra for the samples containing Li. The capability of the microscope was demonstrated using a LiCoO2/Nb doped SrTiO3 sample. Furthermore, the Li distribution on the sample was successfully observed by measuring the Li+ peak intensity as a function of the helium irradiation position.

Original languageEnglish
Article number106601
JournalApplied Physics Express
Volume7
Issue number10
DOIs
Publication statusPublished - Oct 1 2014
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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    Kobayashi, T., Kamoshida, A., Akiyama, H., Watanabe, K., Ohnishi, T., Takada, K., & Suzuki, T. T. (2014). Development of microscopy for lithium analysis using medium-energy ion-stimulated desorption. Applied Physics Express, 7(10), [106601]. https://doi.org/10.7567/APEX.7.106601