Development of new oxygen sensor by microfabrication of single-crystal CuFeTe2 thin films

Masatoshi Kozaki, Yuichiro Higuchi, Akihiro Ikeda, Hisao Kuriyaki, Kiyoshi Toko

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A new oxygen sensor based on resistance change caused by oxygen intercalation for the layered compound CuFeTe2 (CFT) was developed. A microfabrication process for forming many fine pores on the surface of single-crystal CFT thin films by performing wet etching using photolithography was developed with the aim of reducing the response time of the oxygen sensor. A reproducible response of the fabricated samples to oxygen gas was confirmed when 20% oxygen gas and nitrogen gas were alternately introduced into the sample chamber. The microfabricated sample of the single-crystal CFT thin films showed a response time of 2.5 min to 20% oxygen gas, approximately 34% of that of the single-crystal CFT thin films without fine pores.

Original languageEnglish
Pages (from-to)471-477
Number of pages7
JournalSensors and Materials
Volume25
Issue number7
Publication statusPublished - Oct 21 2013

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Materials Science(all)

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