Development of novel groove patterns for CMP pad

Tsutomu Yamazaki, Toshiro K. Doi, Syuhei Kurokawa, Osamu Ohnishi, Michio Uneda, Kiyoshi Seshimo, Hideo Aida

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This study aims to develop the CMP pads that have new groove pattern as control the slurry flow. We have been proposed two type groove patterns as inflow type and outflow type. Here, it is well known that the slurry flow is remarkably important as both to use the slurry effectively and to reduction the slurry quantity consumed of CeO 2 abrasive that is one of rare metals. This paper describes the effect of groove pattern on the slurry flow from the observation image with high-speed camera. In particular, the slurry flow is quantitatively visualized by digital image processing. As a result, the several advantages of both proposed inflow type and outflow type show from a view point of slurry flow compared to the conventional XY-groove pad and No-groove pad.

Original languageEnglish
Title of host publicationUltra-Precision Machining Technologies
Pages264-267
Number of pages4
DOIs
Publication statusPublished - Apr 30 2012
Event8th CHINA-JAPAN International Conference on Ultra-Precision Machining, CJUPM 2011 - Hangzhou City, China
Duration: Nov 20 2011Nov 22 2011

Publication series

NameAdvanced Materials Research
Volume497
ISSN (Print)1022-6680

Other

Other8th CHINA-JAPAN International Conference on Ultra-Precision Machining, CJUPM 2011
CountryChina
CityHangzhou City
Period11/20/1111/22/11

Fingerprint

High speed cameras
Abrasives
Image processing
Metals

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Yamazaki, T., Doi, T. K., Kurokawa, S., Ohnishi, O., Uneda, M., Seshimo, K., & Aida, H. (2012). Development of novel groove patterns for CMP pad. In Ultra-Precision Machining Technologies (pp. 264-267). (Advanced Materials Research; Vol. 497). https://doi.org/10.4028/www.scientific.net/AMR.497.264

Development of novel groove patterns for CMP pad. / Yamazaki, Tsutomu; Doi, Toshiro K.; Kurokawa, Syuhei; Ohnishi, Osamu; Uneda, Michio; Seshimo, Kiyoshi; Aida, Hideo.

Ultra-Precision Machining Technologies. 2012. p. 264-267 (Advanced Materials Research; Vol. 497).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yamazaki, T, Doi, TK, Kurokawa, S, Ohnishi, O, Uneda, M, Seshimo, K & Aida, H 2012, Development of novel groove patterns for CMP pad. in Ultra-Precision Machining Technologies. Advanced Materials Research, vol. 497, pp. 264-267, 8th CHINA-JAPAN International Conference on Ultra-Precision Machining, CJUPM 2011, Hangzhou City, China, 11/20/11. https://doi.org/10.4028/www.scientific.net/AMR.497.264
Yamazaki T, Doi TK, Kurokawa S, Ohnishi O, Uneda M, Seshimo K et al. Development of novel groove patterns for CMP pad. In Ultra-Precision Machining Technologies. 2012. p. 264-267. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.497.264
Yamazaki, Tsutomu ; Doi, Toshiro K. ; Kurokawa, Syuhei ; Ohnishi, Osamu ; Uneda, Michio ; Seshimo, Kiyoshi ; Aida, Hideo. / Development of novel groove patterns for CMP pad. Ultra-Precision Machining Technologies. 2012. pp. 264-267 (Advanced Materials Research).
@inproceedings{56724e33429a4f3db47776c4fdc3dc55,
title = "Development of novel groove patterns for CMP pad",
abstract = "This study aims to develop the CMP pads that have new groove pattern as control the slurry flow. We have been proposed two type groove patterns as inflow type and outflow type. Here, it is well known that the slurry flow is remarkably important as both to use the slurry effectively and to reduction the slurry quantity consumed of CeO 2 abrasive that is one of rare metals. This paper describes the effect of groove pattern on the slurry flow from the observation image with high-speed camera. In particular, the slurry flow is quantitatively visualized by digital image processing. As a result, the several advantages of both proposed inflow type and outflow type show from a view point of slurry flow compared to the conventional XY-groove pad and No-groove pad.",
author = "Tsutomu Yamazaki and Doi, {Toshiro K.} and Syuhei Kurokawa and Osamu Ohnishi and Michio Uneda and Kiyoshi Seshimo and Hideo Aida",
year = "2012",
month = "4",
day = "30",
doi = "10.4028/www.scientific.net/AMR.497.264",
language = "English",
isbn = "9783037853962",
series = "Advanced Materials Research",
pages = "264--267",
booktitle = "Ultra-Precision Machining Technologies",

}

TY - GEN

T1 - Development of novel groove patterns for CMP pad

AU - Yamazaki, Tsutomu

AU - Doi, Toshiro K.

AU - Kurokawa, Syuhei

AU - Ohnishi, Osamu

AU - Uneda, Michio

AU - Seshimo, Kiyoshi

AU - Aida, Hideo

PY - 2012/4/30

Y1 - 2012/4/30

N2 - This study aims to develop the CMP pads that have new groove pattern as control the slurry flow. We have been proposed two type groove patterns as inflow type and outflow type. Here, it is well known that the slurry flow is remarkably important as both to use the slurry effectively and to reduction the slurry quantity consumed of CeO 2 abrasive that is one of rare metals. This paper describes the effect of groove pattern on the slurry flow from the observation image with high-speed camera. In particular, the slurry flow is quantitatively visualized by digital image processing. As a result, the several advantages of both proposed inflow type and outflow type show from a view point of slurry flow compared to the conventional XY-groove pad and No-groove pad.

AB - This study aims to develop the CMP pads that have new groove pattern as control the slurry flow. We have been proposed two type groove patterns as inflow type and outflow type. Here, it is well known that the slurry flow is remarkably important as both to use the slurry effectively and to reduction the slurry quantity consumed of CeO 2 abrasive that is one of rare metals. This paper describes the effect of groove pattern on the slurry flow from the observation image with high-speed camera. In particular, the slurry flow is quantitatively visualized by digital image processing. As a result, the several advantages of both proposed inflow type and outflow type show from a view point of slurry flow compared to the conventional XY-groove pad and No-groove pad.

UR - http://www.scopus.com/inward/record.url?scp=84860176881&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84860176881&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/AMR.497.264

DO - 10.4028/www.scientific.net/AMR.497.264

M3 - Conference contribution

AN - SCOPUS:84860176881

SN - 9783037853962

T3 - Advanced Materials Research

SP - 264

EP - 267

BT - Ultra-Precision Machining Technologies

ER -