Development of opto-electrostatic micro-pump using a focused laser in a high-frequency electric field

Michihiko Nakano, Shinji Katsura, Gerard Touchard, Kazunori Takashima, Akira Mizuno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Micropump driven by laser irradiation in high-frequency electric field was demonstrated. We discovered an opto-electrostatical phenomenon called as opto-electrostatic micro vortex (OEMV) [1]. The OEMV was generated around a laser focal point placed at center of an intense high-frequency electric field in water solution. The direction of the flow was from the laser point towards both of the ac electrodes. In this research, the laser point was placed near one electrode. A flow occurred toward the other electrode. We applied OEMV to generate fluid flow in microchannel as opto-electrostatic micro-pump. The microchannel was fabricated on polydimethylsiloxane (PDMS) sheet. The PDMS sheet was mounted on the glass plate on which the electrodes were patterned. When a Nd:YAG laser (1064nm, cw) and ac voltage at 1MHz was applied, fluid flow occurred. The flow velocity increased linearly with magnitude of the laser power and the ac voltage. The flow velocity around the focal point was several hundreds μm/sec. At the position 3mm apart from the laser spot, flow velocity was 25μm/sec (0.74μl/sec).

Original languageEnglish
Title of host publicationConference Record of the 2005 IEEE Industry Applications Conference, 40th IAS Annual Meeting
Pages2189-2193
Number of pages5
DOIs
Publication statusPublished - Dec 1 2005
Externally publishedYes
Event2005 IEEE Industry Applications Conference, 40th IAS Annual Meeting - Kowloon, Hong Kong, China
Duration: Oct 2 2005Oct 6 2005

Publication series

NameConference Record - IAS Annual Meeting (IEEE Industry Applications Society)
Volume3
ISSN (Print)0197-2618

Other

Other2005 IEEE Industry Applications Conference, 40th IAS Annual Meeting
CountryChina
CityKowloon, Hong Kong
Period10/2/0510/6/05

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All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

Nakano, M., Katsura, S., Touchard, G., Takashima, K., & Mizuno, A. (2005). Development of opto-electrostatic micro-pump using a focused laser in a high-frequency electric field. In Conference Record of the 2005 IEEE Industry Applications Conference, 40th IAS Annual Meeting (pp. 2189-2193). [1518750] (Conference Record - IAS Annual Meeting (IEEE Industry Applications Society); Vol. 3). https://doi.org/10.1109/IAS.2005.1518750