TY - GEN
T1 - Development of opto-electrostatic micro-pump using a focused laser in a high-frequency electric field
AU - Nakano, Michihiko
AU - Katsura, Shinji
AU - Touchard, Gerard
AU - Takashima, Kazunori
AU - Mizuno, Akira
PY - 2005/12/1
Y1 - 2005/12/1
N2 - Micropump driven by laser irradiation in high-frequency electric field was demonstrated. We discovered an opto-electrostatical phenomenon called as opto-electrostatic micro vortex (OEMV) [1]. The OEMV was generated around a laser focal point placed at center of an intense high-frequency electric field in water solution. The direction of the flow was from the laser point towards both of the ac electrodes. In this research, the laser point was placed near one electrode. A flow occurred toward the other electrode. We applied OEMV to generate fluid flow in microchannel as opto-electrostatic micro-pump. The microchannel was fabricated on polydimethylsiloxane (PDMS) sheet. The PDMS sheet was mounted on the glass plate on which the electrodes were patterned. When a Nd:YAG laser (1064nm, cw) and ac voltage at 1MHz was applied, fluid flow occurred. The flow velocity increased linearly with magnitude of the laser power and the ac voltage. The flow velocity around the focal point was several hundreds μm/sec. At the position 3mm apart from the laser spot, flow velocity was 25μm/sec (0.74μl/sec).
AB - Micropump driven by laser irradiation in high-frequency electric field was demonstrated. We discovered an opto-electrostatical phenomenon called as opto-electrostatic micro vortex (OEMV) [1]. The OEMV was generated around a laser focal point placed at center of an intense high-frequency electric field in water solution. The direction of the flow was from the laser point towards both of the ac electrodes. In this research, the laser point was placed near one electrode. A flow occurred toward the other electrode. We applied OEMV to generate fluid flow in microchannel as opto-electrostatic micro-pump. The microchannel was fabricated on polydimethylsiloxane (PDMS) sheet. The PDMS sheet was mounted on the glass plate on which the electrodes were patterned. When a Nd:YAG laser (1064nm, cw) and ac voltage at 1MHz was applied, fluid flow occurred. The flow velocity increased linearly with magnitude of the laser power and the ac voltage. The flow velocity around the focal point was several hundreds μm/sec. At the position 3mm apart from the laser spot, flow velocity was 25μm/sec (0.74μl/sec).
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U2 - 10.1109/IAS.2005.1518750
DO - 10.1109/IAS.2005.1518750
M3 - Conference contribution
AN - SCOPUS:33745887529
SN - 0780392086
SN - 9780780392083
T3 - Conference Record - IAS Annual Meeting (IEEE Industry Applications Society)
SP - 2189
EP - 2193
BT - Conference Record of the 2005 IEEE Industry Applications Conference, 40th IAS Annual Meeting
T2 - 2005 IEEE Industry Applications Conference, 40th IAS Annual Meeting
Y2 - 2 October 2005 through 6 October 2005
ER -