Abstract
An energy dispersive spectrometer with a superconducting transition edge sensor (TES) microcalorimeter mounted on a scanning transmission electron microscope (STEM) has been developed to improve the accuracy of nanoscale material analysis. Because of the magnetic field generated by the STEM objective lens, a TES microcalorimeter cannot be placed in a STEM column. Therefore, a polycapillary optics is used for collecting X-rays emitted by a STEM specimen on the TES microcalorimeter. The counting rate of 300 cps was insufficient for a practical application to the STEM. To achieve the counting rate larger than 5000 cps, we are now conducting development of a 64-pixel TES microcalorimeter system operating on the STEM. We developed a new polycapillary optics for a 64-pixel TES microcalorimeter with using a X-ray transmission simulation model that we made. We performed energy spectrum measurements of X-rays transmitted by the fabricated new polycapillary optics for evaluating the X-ray transmission characteristics.
| Original language | English |
|---|---|
| Title of host publication | 2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9781509016426 |
| DOIs | |
| Publication status | Published - Oct 16 2017 |
| Event | 2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016 - Strasbourg, France Duration: Oct 29 2016 → Nov 6 2016 |
Publication series
| Name | 2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016 |
|---|---|
| Volume | 2017-January |
Other
| Other | 2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016 |
|---|---|
| Country | France |
| City | Strasbourg |
| Period | 10/29/16 → 11/6/16 |
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All Science Journal Classification (ASJC) codes
- Radiology Nuclear Medicine and imaging
- Instrumentation
- Nuclear and High Energy Physics
- Electronic, Optical and Magnetic Materials
Cite this
Development of polycapillary optics for a TES Microcalorimeter EDS System on a Scanning Transmission Electron Microscope. / Takano, Akira; Maehata, Keisuke; Iyomoto, Naoko; Hara, Toru; Mitsuda, Kazuhisa; Yamasaki, Noriko; Tanaka, Keiichi.
2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016. Institute of Electrical and Electronics Engineers Inc., 2017. 8069767 (2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016; Vol. 2017-January).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Development of polycapillary optics for a TES Microcalorimeter EDS System on a Scanning Transmission Electron Microscope
AU - Takano, Akira
AU - Maehata, Keisuke
AU - Iyomoto, Naoko
AU - Hara, Toru
AU - Mitsuda, Kazuhisa
AU - Yamasaki, Noriko
AU - Tanaka, Keiichi
PY - 2017/10/16
Y1 - 2017/10/16
N2 - An energy dispersive spectrometer with a superconducting transition edge sensor (TES) microcalorimeter mounted on a scanning transmission electron microscope (STEM) has been developed to improve the accuracy of nanoscale material analysis. Because of the magnetic field generated by the STEM objective lens, a TES microcalorimeter cannot be placed in a STEM column. Therefore, a polycapillary optics is used for collecting X-rays emitted by a STEM specimen on the TES microcalorimeter. The counting rate of 300 cps was insufficient for a practical application to the STEM. To achieve the counting rate larger than 5000 cps, we are now conducting development of a 64-pixel TES microcalorimeter system operating on the STEM. We developed a new polycapillary optics for a 64-pixel TES microcalorimeter with using a X-ray transmission simulation model that we made. We performed energy spectrum measurements of X-rays transmitted by the fabricated new polycapillary optics for evaluating the X-ray transmission characteristics.
AB - An energy dispersive spectrometer with a superconducting transition edge sensor (TES) microcalorimeter mounted on a scanning transmission electron microscope (STEM) has been developed to improve the accuracy of nanoscale material analysis. Because of the magnetic field generated by the STEM objective lens, a TES microcalorimeter cannot be placed in a STEM column. Therefore, a polycapillary optics is used for collecting X-rays emitted by a STEM specimen on the TES microcalorimeter. The counting rate of 300 cps was insufficient for a practical application to the STEM. To achieve the counting rate larger than 5000 cps, we are now conducting development of a 64-pixel TES microcalorimeter system operating on the STEM. We developed a new polycapillary optics for a 64-pixel TES microcalorimeter with using a X-ray transmission simulation model that we made. We performed energy spectrum measurements of X-rays transmitted by the fabricated new polycapillary optics for evaluating the X-ray transmission characteristics.
UR - http://www.scopus.com/inward/record.url?scp=85041732618&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85041732618&partnerID=8YFLogxK
U2 - 10.1109/NSSMIC.2016.8069767
DO - 10.1109/NSSMIC.2016.8069767
M3 - Conference contribution
AN - SCOPUS:85041732618
T3 - 2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016
BT - 2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016
PB - Institute of Electrical and Electronics Engineers Inc.
ER -