Development of polycapillary optics for a TES Microcalorimeter EDS System on a Scanning Transmission Electron Microscope

Akira Takano, Keisuke Maehata, Naoko Iyomoto, Toru Hara, Kazuhisa Mitsuda, Noriko Yamasaki, Keiichi Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An energy dispersive spectrometer with a superconducting transition edge sensor (TES) microcalorimeter mounted on a scanning transmission electron microscope (STEM) has been developed to improve the accuracy of nanoscale material analysis. Because of the magnetic field generated by the STEM objective lens, a TES microcalorimeter cannot be placed in a STEM column. Therefore, a polycapillary optics is used for collecting X-rays emitted by a STEM specimen on the TES microcalorimeter. The counting rate of 300 cps was insufficient for a practical application to the STEM. To achieve the counting rate larger than 5000 cps, we are now conducting development of a 64-pixel TES microcalorimeter system operating on the STEM. We developed a new polycapillary optics for a 64-pixel TES microcalorimeter with using a X-ray transmission simulation model that we made. We performed energy spectrum measurements of X-rays transmitted by the fabricated new polycapillary optics for evaluating the X-ray transmission characteristics.

Original languageEnglish
Title of host publication2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509016426
DOIs
Publication statusPublished - Oct 16 2017
Event2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016 - Strasbourg, France
Duration: Oct 29 2016Nov 6 2016

Publication series

Name2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016
Volume2017-January

Other

Other2016 IEEE Nuclear Science Symposium, Medical Imaging Conference and Room-Temperature Semiconductor Detector Workshop, NSS/MIC/RTSD 2016
CountryFrance
CityStrasbourg
Period10/29/1611/6/16

All Science Journal Classification (ASJC) codes

  • Radiology Nuclear Medicine and imaging
  • Instrumentation
  • Nuclear and High Energy Physics
  • Electronic, Optical and Magnetic Materials

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