Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources

Reiho Amano, Thanh Hung Dinh, Atsushi Sasanuma, Goki Arai, Yusuke Fujii, Kenichiro Nanto, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Tetsuya Makimura, Taisuke Miura, Akira Endo, Tomas Mocek, Padraig Dunne, Gerry O'Sullivan, Takeshi Higashiguchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We produced a 3-15-ns CO2 laser pulse with 1011 W/cm2 for an efficient extreme ultraviolet (EUV) source by rare earth element of Gd. The EUV emission was observed a sharp spectral structure at 6.79 nm.

Original languageEnglish
Title of host publication2015 IEEE Photonics Conference, IPC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages78-79
Number of pages2
ISBN (Electronic)9781479974658
DOIs
Publication statusPublished - Nov 9 2015
EventIEEE Photonics Conference, IPC 2015 - Reston, United States
Duration: Aug 30 2015Aug 31 2015

Publication series

Name2015 IEEE Photonics Conference, IPC 2015

Other

OtherIEEE Photonics Conference, IPC 2015
CountryUnited States
CityReston
Period8/30/158/31/15

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Amano, R., Dinh, T. H., Sasanuma, A., Arai, G., Fujii, Y., Nanto, K., ... Higashiguchi, T. (2015). Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources. In 2015 IEEE Photonics Conference, IPC 2015 (pp. 78-79). [7323554] (2015 IEEE Photonics Conference, IPC 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IPCon.2015.7323554