Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources

Reiho Amano; Thanh Hung Dinh; Atsushi Sasanuma; Goki Arai; Yusuke Fujii; Kenichiro Nanto; Akihiko Takahashi; Daisuke Nakamura; Tatsuo Okada; Tetsuya Makimura; Taisuke Miura; Akira Endo; Tomas Mocek; Padraig Dunne; Gerry O'Sullivan; Takeshi Higashiguchi

doi:10.1109/IPCon.2015.7323554

Development of short pulse CO₂ laser for efficient rare earth plasma extreme ultraviolet sources

Reiho Amano, Thanh Hung Dinh, Atsushi Sasanuma, Goki Arai, Yusuke Fujii, Kenichiro Nanto, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Tetsuya Makimura, Taisuke Miura, Akira Endo, Tomas Mocek, Padraig Dunne, Gerry O'Sullivan, Takeshi Higashiguchi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We produced a 3-15-ns CO₂ laser pulse with 10¹¹ W/cm² for an efficient extreme ultraviolet (EUV) source by rare earth element of Gd. The EUV emission was observed a sharp spectral structure at 6.79 nm.

Original language	English
Title of host publication	2015 IEEE Photonics Conference, IPC 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	78-79
Number of pages	2
ISBN (Electronic)	9781479974658
DOIs	https://doi.org/10.1109/IPCon.2015.7323554
Publication status	Published - Nov 9 2015
Event	IEEE Photonics Conference, IPC 2015 - Reston, United States Duration: Aug 30 2015 → Aug 31 2015

Publication series

Name	2015 IEEE Photonics Conference, IPC 2015

Other

Other	IEEE Photonics Conference, IPC 2015
Country/Territory	United States
City	Reston
Period	8/30/15 → 8/31/15

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/IPCon.2015.7323554

Cite this

Amano, R., Dinh, T. H., Sasanuma, A., Arai, G., Fujii, Y., Nanto, K., Takahashi, A., Nakamura, D., Okada, T., Makimura, T., Miura, T., Endo, A., Mocek, T., Dunne, P., O'Sullivan, G., & Higashiguchi, T. (2015). Development of short pulse CO₂ laser for efficient rare earth plasma extreme ultraviolet sources. In 2015 IEEE Photonics Conference, IPC 2015 (pp. 78-79). [7323554] (2015 IEEE Photonics Conference, IPC 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IPCon.2015.7323554

Development of short pulse CO₂ laser for efficient rare earth plasma extreme ultraviolet sources. / Amano, Reiho; Dinh, Thanh Hung; Sasanuma, Atsushi et al.
2015 IEEE Photonics Conference, IPC 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 78-79 7323554 (2015 IEEE Photonics Conference, IPC 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Amano, R, Dinh, TH, Sasanuma, A, Arai, G, Fujii, Y, Nanto, K, Takahashi, A , Nakamura, D, Okada, T, Makimura, T, Miura, T, Endo, A, Mocek, T, Dunne, P, O'Sullivan, G & Higashiguchi, T 2015, Development of short pulse CO₂ laser for efficient rare earth plasma extreme ultraviolet sources. in 2015 IEEE Photonics Conference, IPC 2015., 7323554, 2015 IEEE Photonics Conference, IPC 2015, Institute of Electrical and Electronics Engineers Inc., pp. 78-79, IEEE Photonics Conference, IPC 2015, Reston, United States, 8/30/15. https://doi.org/10.1109/IPCon.2015.7323554

@inproceedings{88df4b12bace4db69e89d454d361022d,

title = "Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources",

abstract = "We produced a 3-15-ns CO2 laser pulse with 1011 W/cm2 for an efficient extreme ultraviolet (EUV) source by rare earth element of Gd. The EUV emission was observed a sharp spectral structure at 6.79 nm.",

author = "Reiho Amano and Dinh, {Thanh Hung} and Atsushi Sasanuma and Goki Arai and Yusuke Fujii and Kenichiro Nanto and Akihiko Takahashi and Daisuke Nakamura and Tatsuo Okada and Tetsuya Makimura and Taisuke Miura and Akira Endo and Tomas Mocek and Padraig Dunne and Gerry O'Sullivan and Takeshi Higashiguchi",

year = "2015",

month = nov,

day = "9",

doi = "10.1109/IPCon.2015.7323554",

language = "English",

series = "2015 IEEE Photonics Conference, IPC 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "78--79",

booktitle = "2015 IEEE Photonics Conference, IPC 2015",

address = "United States",

note = "IEEE Photonics Conference, IPC 2015 ; Conference date: 30-08-2015 Through 31-08-2015",

}

TY - GEN

T1 - Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources

AU - Amano, Reiho

AU - Dinh, Thanh Hung

AU - Sasanuma, Atsushi

AU - Arai, Goki

AU - Fujii, Yusuke

AU - Nanto, Kenichiro

AU - Takahashi, Akihiko

AU - Nakamura, Daisuke

AU - Okada, Tatsuo

AU - Makimura, Tetsuya

AU - Miura, Taisuke

AU - Endo, Akira

AU - Mocek, Tomas

AU - Dunne, Padraig

AU - O'Sullivan, Gerry

AU - Higashiguchi, Takeshi

PY - 2015/11/9

Y1 - 2015/11/9

N2 - We produced a 3-15-ns CO2 laser pulse with 1011 W/cm2 for an efficient extreme ultraviolet (EUV) source by rare earth element of Gd. The EUV emission was observed a sharp spectral structure at 6.79 nm.

AB - We produced a 3-15-ns CO2 laser pulse with 1011 W/cm2 for an efficient extreme ultraviolet (EUV) source by rare earth element of Gd. The EUV emission was observed a sharp spectral structure at 6.79 nm.

UR - http://www.scopus.com/inward/record.url?scp=84964852189&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84964852189&partnerID=8YFLogxK

U2 - 10.1109/IPCon.2015.7323554

DO - 10.1109/IPCon.2015.7323554

M3 - Conference contribution

AN - SCOPUS:84964852189

T3 - 2015 IEEE Photonics Conference, IPC 2015

SP - 78

EP - 79

BT - 2015 IEEE Photonics Conference, IPC 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - IEEE Photonics Conference, IPC 2015

Y2 - 30 August 2015 through 31 August 2015

ER -