Development of the core technologies for large-scale 3D-MEMS optical switches

Yuji Uenishi, Renshi Sawada, Joji Yamaguchi, Tsuyoshi Yamamoto

Research output: Contribution to journalArticle

Abstract

MEMS optical switches have been given attention as a key fabric for large-scale optical switches because of their potentially compact and low-cost features. The main components of the switch are MEMS mirror array and an optical fiber collimator array. MEMS mirror array can directly handle multi-channel optical signals from fiber to fiber without converting them to electric signals, which enables us to realize all-optical, free-space cross-connection. The MEMS mirror developed by NTT, which is made of single-crystal silicon, has the flatness of optical quality and a durable mechanical structure. The mirror also has a unique terrace-shape driving electrode to make it tilt at low-driving voltage. Optical fiber collimator array is another key component for MEMS optical switch. We propose a novel way to make a low-cost and high-accuracy optical fiber collimator array. This paper demonstrates the characteristics of the two main components mentioned above which constitute the free-space optical switch module.

Original languageEnglish
Pages (from-to)879-885
Number of pages7
JournalNTT R and D
Volume51
Issue number11
Publication statusPublished - 2002
Externally publishedYes

Fingerprint

Optical switches
MEMS
Mirrors
Optical fibers
Fibers
Costs
Switches
Single crystals
Silicon
Electrodes
Electric potential

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Uenishi, Y., Sawada, R., Yamaguchi, J., & Yamamoto, T. (2002). Development of the core technologies for large-scale 3D-MEMS optical switches. NTT R and D, 51(11), 879-885.

Development of the core technologies for large-scale 3D-MEMS optical switches. / Uenishi, Yuji; Sawada, Renshi; Yamaguchi, Joji; Yamamoto, Tsuyoshi.

In: NTT R and D, Vol. 51, No. 11, 2002, p. 879-885.

Research output: Contribution to journalArticle

Uenishi, Y, Sawada, R, Yamaguchi, J & Yamamoto, T 2002, 'Development of the core technologies for large-scale 3D-MEMS optical switches', NTT R and D, vol. 51, no. 11, pp. 879-885.
Uenishi Y, Sawada R, Yamaguchi J, Yamamoto T. Development of the core technologies for large-scale 3D-MEMS optical switches. NTT R and D. 2002;51(11):879-885.
Uenishi, Yuji ; Sawada, Renshi ; Yamaguchi, Joji ; Yamamoto, Tsuyoshi. / Development of the core technologies for large-scale 3D-MEMS optical switches. In: NTT R and D. 2002 ; Vol. 51, No. 11. pp. 879-885.
@article{b7a03795e6644ef190b16c9dc09f34f0,
title = "Development of the core technologies for large-scale 3D-MEMS optical switches",
abstract = "MEMS optical switches have been given attention as a key fabric for large-scale optical switches because of their potentially compact and low-cost features. The main components of the switch are MEMS mirror array and an optical fiber collimator array. MEMS mirror array can directly handle multi-channel optical signals from fiber to fiber without converting them to electric signals, which enables us to realize all-optical, free-space cross-connection. The MEMS mirror developed by NTT, which is made of single-crystal silicon, has the flatness of optical quality and a durable mechanical structure. The mirror also has a unique terrace-shape driving electrode to make it tilt at low-driving voltage. Optical fiber collimator array is another key component for MEMS optical switch. We propose a novel way to make a low-cost and high-accuracy optical fiber collimator array. This paper demonstrates the characteristics of the two main components mentioned above which constitute the free-space optical switch module.",
author = "Yuji Uenishi and Renshi Sawada and Joji Yamaguchi and Tsuyoshi Yamamoto",
year = "2002",
language = "English",
volume = "51",
pages = "879--885",
journal = "NTT R and D",
issn = "0915-2326",
publisher = "Telecommunications Association",
number = "11",

}

TY - JOUR

T1 - Development of the core technologies for large-scale 3D-MEMS optical switches

AU - Uenishi, Yuji

AU - Sawada, Renshi

AU - Yamaguchi, Joji

AU - Yamamoto, Tsuyoshi

PY - 2002

Y1 - 2002

N2 - MEMS optical switches have been given attention as a key fabric for large-scale optical switches because of their potentially compact and low-cost features. The main components of the switch are MEMS mirror array and an optical fiber collimator array. MEMS mirror array can directly handle multi-channel optical signals from fiber to fiber without converting them to electric signals, which enables us to realize all-optical, free-space cross-connection. The MEMS mirror developed by NTT, which is made of single-crystal silicon, has the flatness of optical quality and a durable mechanical structure. The mirror also has a unique terrace-shape driving electrode to make it tilt at low-driving voltage. Optical fiber collimator array is another key component for MEMS optical switch. We propose a novel way to make a low-cost and high-accuracy optical fiber collimator array. This paper demonstrates the characteristics of the two main components mentioned above which constitute the free-space optical switch module.

AB - MEMS optical switches have been given attention as a key fabric for large-scale optical switches because of their potentially compact and low-cost features. The main components of the switch are MEMS mirror array and an optical fiber collimator array. MEMS mirror array can directly handle multi-channel optical signals from fiber to fiber without converting them to electric signals, which enables us to realize all-optical, free-space cross-connection. The MEMS mirror developed by NTT, which is made of single-crystal silicon, has the flatness of optical quality and a durable mechanical structure. The mirror also has a unique terrace-shape driving electrode to make it tilt at low-driving voltage. Optical fiber collimator array is another key component for MEMS optical switch. We propose a novel way to make a low-cost and high-accuracy optical fiber collimator array. This paper demonstrates the characteristics of the two main components mentioned above which constitute the free-space optical switch module.

UR - http://www.scopus.com/inward/record.url?scp=0036965295&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036965295&partnerID=8YFLogxK

M3 - Article

VL - 51

SP - 879

EP - 885

JO - NTT R and D

JF - NTT R and D

SN - 0915-2326

IS - 11

ER -