TY - JOUR
T1 - Development of the nano-probe system based on the laser-trapping technique
AU - Michihata, M.
AU - Takaya, Y.
AU - Hayashi, T.
N1 - Funding Information:
This research was supported by the Japan Science and Technology Agency, Creation and Support Program for Start-ups from Universities, 1510, and the Ministry of Education, Science, Sports and Culture, Grant-in-Aid for Scientific Research, 15206016, 2005.
PY - 2008
Y1 - 2008
N2 - A nano-coordinate measuring machine (CMM) has been developed to achieve a measuring accuracy of 50 nm and a measuring volume of (10 mm)3. To meet these stringent requirements, a laser-trapping probe is employed as a nano-sensing probe. This paper describes the development of the nano-CMM system with a laser-trapping probe and describes the performance of the probe via an assessment of the flatness and microsphere. It is observed that the laser-trapping probe can sense three-dimensional objects with a repeatability of 32 nm. Using the nano-CMM, the measurement uncertainty is estimated to be 335 nm (k = 2).
AB - A nano-coordinate measuring machine (CMM) has been developed to achieve a measuring accuracy of 50 nm and a measuring volume of (10 mm)3. To meet these stringent requirements, a laser-trapping probe is employed as a nano-sensing probe. This paper describes the development of the nano-CMM system with a laser-trapping probe and describes the performance of the probe via an assessment of the flatness and microsphere. It is observed that the laser-trapping probe can sense three-dimensional objects with a repeatability of 32 nm. Using the nano-CMM, the measurement uncertainty is estimated to be 335 nm (k = 2).
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U2 - 10.1016/j.cirp.2008.03.016
DO - 10.1016/j.cirp.2008.03.016
M3 - Article
AN - SCOPUS:43649088471
SN - 0007-8506
VL - 57
SP - 493
EP - 496
JO - CIRP Annals - Manufacturing Technology
JF - CIRP Annals - Manufacturing Technology
IS - 1
ER -