Abstract
This paper presents a system that can be used for micro-hole measurement; the system comprises an optical fiber stylus that is 5 μm in diameter. The stylus deflects when it comes into contact with the measured surface; this deflection is measured optically. In this study, the design parameters of the optical system are determined using a ray-tracing method, and a prototype of the probing system is fabricated to verify ray-tracing simulation results; furthermore, the performance of the system is evaluated experimentally. The results show that the design parameters of this system can be determined using ray-tracing; the resolution of the measurement system using this shaft was approximately 3 nm, and the practicality of this system was confirmed by measuring the shape of a micro-hole 100 μm in diameter and 475 μm in depth.
| Original language | English |
|---|---|
| Article number | 24 |
| Journal | Fibers |
| Volume | 4 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Sep 1 2016 |
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All Science Journal Classification (ASJC) codes
- Ceramics and Composites
- Civil and Structural Engineering
- Biomaterials
- Mechanics of Materials
Cite this
Development of touch probing system using a fiber stylus. / Murakami, Hiroshi; Katsuki, Akio; Sajima, Takao.
In: Fibers, Vol. 4, No. 3, 24, 01.09.2016.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Development of touch probing system using a fiber stylus
AU - Murakami, Hiroshi
AU - Katsuki, Akio
AU - Sajima, Takao
PY - 2016/9/1
Y1 - 2016/9/1
N2 - This paper presents a system that can be used for micro-hole measurement; the system comprises an optical fiber stylus that is 5 μm in diameter. The stylus deflects when it comes into contact with the measured surface; this deflection is measured optically. In this study, the design parameters of the optical system are determined using a ray-tracing method, and a prototype of the probing system is fabricated to verify ray-tracing simulation results; furthermore, the performance of the system is evaluated experimentally. The results show that the design parameters of this system can be determined using ray-tracing; the resolution of the measurement system using this shaft was approximately 3 nm, and the practicality of this system was confirmed by measuring the shape of a micro-hole 100 μm in diameter and 475 μm in depth.
AB - This paper presents a system that can be used for micro-hole measurement; the system comprises an optical fiber stylus that is 5 μm in diameter. The stylus deflects when it comes into contact with the measured surface; this deflection is measured optically. In this study, the design parameters of the optical system are determined using a ray-tracing method, and a prototype of the probing system is fabricated to verify ray-tracing simulation results; furthermore, the performance of the system is evaluated experimentally. The results show that the design parameters of this system can be determined using ray-tracing; the resolution of the measurement system using this shaft was approximately 3 nm, and the practicality of this system was confirmed by measuring the shape of a micro-hole 100 μm in diameter and 475 μm in depth.
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UR - http://www.scopus.com/inward/citedby.url?scp=85028573619&partnerID=8YFLogxK
U2 - 10.3390/fib4030024
DO - 10.3390/fib4030024
M3 - Article
VL - 4
JO - Fibers
JF - Fibers
SN - 2079-6439
IS - 3
M1 - 24
ER -