Abstract
This paper presents a system that can be used for micro-hole measurement; the system comprises an optical fiber stylus that is 5 μm in diameter. The stylus deflects when it comes into contact with the measured surface; this deflection is measured optically. In this study, the design parameters of the optical system are determined using a ray-tracing method, and a prototype of the probing system is fabricated to verify ray-tracing simulation results; furthermore, the performance of the system is evaluated experimentally. The results show that the design parameters of this system can be determined using ray-tracing; the resolution of the measurement system using this shaft was approximately 3 nm, and the practicality of this system was confirmed by measuring the shape of a micro-hole 100 μm in diameter and 475 μm in depth.
Original language | English |
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Article number | 24 |
Journal | Fibers |
Volume | 4 |
Issue number | 3 |
DOIs | |
Publication status | Published - Sep 1 2016 |
All Science Journal Classification (ASJC) codes
- Ceramics and Composites
- Civil and Structural Engineering
- Biomaterials
- Mechanics of Materials