Development of VHF plasma source with short discharge gap for solar cells

Yasuhiro Yamauchi, Tomoyoshi Baba, Yoshiaki Takeuchi, Hiromu Takatsuka, Hiroshi Muta, Kiichiro Uchino, Yoshinobu Kawai

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A new balanced power feeding method was applied to produce a large area VHF plasma using short discharge gaps and the electric characteristics of the discharge electrodes were measured as a function of pressure for different discharge gaps. It was found that the new balanced power feeding method is suitable for short gap discharges in the VHF range. Furthermore, the plasma parameters were examined as a function of pressure for different discharge gaps. The plasma density peaked at a certain pressure independent of the length of discharge gaps.

Original languageEnglish
JournalPlasma Processes and Polymers
Volume6
Issue numberSUPPL. 1
DOIs
Publication statusPublished - Dec 1 2009

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Plasma sources
Solar cells
solar cells
Plasmas
Plasma density
Electrodes
plasma density
electrodes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Polymers and Plastics

Cite this

Development of VHF plasma source with short discharge gap for solar cells. / Yamauchi, Yasuhiro; Baba, Tomoyoshi; Takeuchi, Yoshiaki; Takatsuka, Hiromu; Muta, Hiroshi; Uchino, Kiichiro; Kawai, Yoshinobu.

In: Plasma Processes and Polymers, Vol. 6, No. SUPPL. 1, 01.12.2009.

Research output: Contribution to journalArticle

Yamauchi, Y, Baba, T, Takeuchi, Y, Takatsuka, H, Muta, H, Uchino, K & Kawai, Y 2009, 'Development of VHF plasma source with short discharge gap for solar cells', Plasma Processes and Polymers, vol. 6, no. SUPPL. 1. https://doi.org/10.1002/ppap.200930610
Yamauchi, Yasuhiro ; Baba, Tomoyoshi ; Takeuchi, Yoshiaki ; Takatsuka, Hiromu ; Muta, Hiroshi ; Uchino, Kiichiro ; Kawai, Yoshinobu. / Development of VHF plasma source with short discharge gap for solar cells. In: Plasma Processes and Polymers. 2009 ; Vol. 6, No. SUPPL. 1.
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