Development of VHF plasma source with short discharge gap for solar cells

Yasuhiro Yamauchi; Tomoyoshi Baba; Yoshiaki Takeuchi; Hiromu Takatsuka; Hiroshi Muta; Kiichiro Uchino; Yoshinobu Kawai

doi:10.1002/ppap.200930610

Development of VHF plasma source with short discharge gap for solar cells

Yasuhiro Yamauchi, Tomoyoshi Baba, Yoshiaki Takeuchi, Hiromu Takatsuka, Hiroshi Muta, Kiichiro Uchino, Yoshinobu Kawai

Electrical Engineering Sciences

Research output: Contribution to journal › Article

4 Citations (Scopus)

Abstract

A new balanced power feeding method was applied to produce a large area VHF plasma using short discharge gaps and the electric characteristics of the discharge electrodes were measured as a function of pressure for different discharge gaps. It was found that the new balanced power feeding method is suitable for short gap discharges in the VHF range. Furthermore, the plasma parameters were examined as a function of pressure for different discharge gaps. The plasma density peaked at a certain pressure independent of the length of discharge gaps.

Original language	English
Pages (from-to)	S273-S277
Journal	Plasma Processes and Polymers
Volume	6
Issue number	SUPPL. 1
DOIs	https://doi.org/10.1002/ppap.200930610
Publication status	Published - 2009

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Polymers and Plastics

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10.1002/ppap.200930610

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abstract = "A new balanced power feeding method was applied to produce a large area VHF plasma using short discharge gaps and the electric characteristics of the discharge electrodes were measured as a function of pressure for different discharge gaps. It was found that the new balanced power feeding method is suitable for short gap discharges in the VHF range. Furthermore, the plasma parameters were examined as a function of pressure for different discharge gaps. The plasma density peaked at a certain pressure independent of the length of discharge gaps.",

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AU - Yamauchi, Yasuhiro

AU - Baba, Tomoyoshi

AU - Takeuchi, Yoshiaki

AU - Takatsuka, Hiromu

AU - Muta, Hiroshi

AU - Uchino, Kiichiro

AU - Kawai, Yoshinobu

PY - 2009

Y1 - 2009

N2 - A new balanced power feeding method was applied to produce a large area VHF plasma using short discharge gaps and the electric characteristics of the discharge electrodes were measured as a function of pressure for different discharge gaps. It was found that the new balanced power feeding method is suitable for short gap discharges in the VHF range. Furthermore, the plasma parameters were examined as a function of pressure for different discharge gaps. The plasma density peaked at a certain pressure independent of the length of discharge gaps.

AB - A new balanced power feeding method was applied to produce a large area VHF plasma using short discharge gaps and the electric characteristics of the discharge electrodes were measured as a function of pressure for different discharge gaps. It was found that the new balanced power feeding method is suitable for short gap discharges in the VHF range. Furthermore, the plasma parameters were examined as a function of pressure for different discharge gaps. The plasma density peaked at a certain pressure independent of the length of discharge gaps.

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