Development of VHF plasma source with short discharge gap for solar cells

A new balanced power feeding method was applied to produce a large area VHF plasma using short discharge gaps and the electric characteristics of the discharge electrodes were measured as a function of pressure for different discharge gaps. It was found that the new balanced power feeding method is suitable for short gap discharges in the VHF range. Furthermore, the plasma parameters were examined as a function of pressure for different discharge gaps. The plasma density peaked at a certain pressure independent of the length of discharge gaps.