Development of VHF plasma source with short discharge gap for solar cells

Yasuhiro Yamauchi, Tomoyoshi Baba, Yoshiaki Takeuchi, Hiromu Takatsuka, Hiroshi Muta, Kiichiro Uchino, Yoshinobu Kawai

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A new balanced power feeding method was applied to produce a large area VHF plasma using short discharge gaps and the electric characteristics of the discharge electrodes were measured as a function of pressure for different discharge gaps. It was found that the new balanced power feeding method is suitable for short gap discharges in the VHF range. Furthermore, the plasma parameters were examined as a function of pressure for different discharge gaps. The plasma density peaked at a certain pressure independent of the length of discharge gaps.

Original languageEnglish
Pages (from-to)S273-S277
JournalPlasma Processes and Polymers
Volume6
Issue numberSUPPL. 1
DOIs
Publication statusPublished - 2009

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Polymers and Plastics

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