Abstract
A new balanced power feeding method was applied to produce a large area VHF plasma using short discharge gaps and the electric characteristics of the discharge electrodes were measured as a function of pressure for different discharge gaps. It was found that the new balanced power feeding method is suitable for short gap discharges in the VHF range. Furthermore, the plasma parameters were examined as a function of pressure for different discharge gaps. The plasma density peaked at a certain pressure independent of the length of discharge gaps.
| Original language | English |
|---|---|
| Journal | Plasma Processes and Polymers |
| Volume | 6 |
| Issue number | SUPPL. 1 |
| DOIs | |
| Publication status | Published - Dec 1 2009 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Polymers and Plastics
Cite this
Development of VHF plasma source with short discharge gap for solar cells. / Yamauchi, Yasuhiro; Baba, Tomoyoshi; Takeuchi, Yoshiaki; Takatsuka, Hiromu; Muta, Hiroshi; Uchino, Kiichiro; Kawai, Yoshinobu.
In: Plasma Processes and Polymers, Vol. 6, No. SUPPL. 1, 01.12.2009.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Development of VHF plasma source with short discharge gap for solar cells
AU - Yamauchi, Yasuhiro
AU - Baba, Tomoyoshi
AU - Takeuchi, Yoshiaki
AU - Takatsuka, Hiromu
AU - Muta, Hiroshi
AU - Uchino, Kiichiro
AU - Kawai, Yoshinobu
PY - 2009/12/1
Y1 - 2009/12/1
N2 - A new balanced power feeding method was applied to produce a large area VHF plasma using short discharge gaps and the electric characteristics of the discharge electrodes were measured as a function of pressure for different discharge gaps. It was found that the new balanced power feeding method is suitable for short gap discharges in the VHF range. Furthermore, the plasma parameters were examined as a function of pressure for different discharge gaps. The plasma density peaked at a certain pressure independent of the length of discharge gaps.
AB - A new balanced power feeding method was applied to produce a large area VHF plasma using short discharge gaps and the electric characteristics of the discharge electrodes were measured as a function of pressure for different discharge gaps. It was found that the new balanced power feeding method is suitable for short gap discharges in the VHF range. Furthermore, the plasma parameters were examined as a function of pressure for different discharge gaps. The plasma density peaked at a certain pressure independent of the length of discharge gaps.
UR - http://www.scopus.com/inward/record.url?scp=77954918968&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77954918968&partnerID=8YFLogxK
U2 - 10.1002/ppap.200930610
DO - 10.1002/ppap.200930610
M3 - Article
AN - SCOPUS:77954918968
VL - 6
JO - Plasma Processes and Polymers
JF - Plasma Processes and Polymers
SN - 1612-8850
IS - SUPPL. 1
ER -