Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source

Atsushi Matsumoto, Hiroki Tanaka, Kouji Akinaga, Akihiko Takahashi, Tatsuo Okada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In order to understand the behavior of neutral particles in laser-produced plasmas used for the extreme ultraviolet light source, we have been developing a visualization system of neural particles by means of planar Rayleigh scattering and planar laser-induced fluorescence spectroscopy (LIF). Based on the measurement, influence of EUV light absorption and kinetics of Sn plasma are discussed.

Original languageEnglish
Title of host publicationPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Pages1500-1501
Number of pages2
DOIs
Publication statusPublished - Dec 1 2005
EventPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 - Tokyo, Japan
Duration: Jul 11 2005Jul 15 2005

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume2005

Other

OtherPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
CountryJapan
CityTokyo
Period7/11/057/15/05

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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    Matsumoto, A., Tanaka, H., Akinaga, K., Takahashi, A., & Okada, T. (2005). Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 (pp. 1500-1501). [1569794] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2005). https://doi.org/10.1109/CLEOPR.2005.1569794