Diagnostics of low-density glow discharge plasmas using Thomson scattering

K. Muraoka, Kiichiro Uchino, M. D. Bowden

Research output: Contribution to journalReview article

65 Citations (Scopus)

Abstract

In recent years, the method of incoherent Thomson scattering has been applied to make measurements of electron properties of glow discharges used for industrial applications. These plasmas have electron density of the order of 1017 m-3 and electron temperature of a few eV. This paper reviews the recent progress in this research area. Details of the experimental systems are given and examples of measurements made in several different types of glow discharges are presented. A method in which Thomson scattering is combined with Rayleigh scattering to provide direct measurements of the neutral density is also described and an example of measurements is given. The electron velocity and energy distribution functions are also an important property of these plasmas, and the extent to which Thomson scattering can measure the distribution function is discussed. Future trends for Thomson scattering in glow discharges are also discussed.

Original languageEnglish
Pages (from-to)1221-1239
Number of pages19
JournalPlasma Physics and Controlled Fusion
Volume40
Issue number7
DOIs
Publication statusPublished - Dec 1 1998

Fingerprint

Thomson scattering
Glow discharges
glow discharges
Scattering
Plasmas
Distribution functions
distribution functions
Incoherent scattering
Rayleigh scattering
incoherent scattering
Electrons
Electron temperature
Industrial applications
Carrier concentration
energy distribution
electrons
velocity distribution
electron energy
trends

All Science Journal Classification (ASJC) codes

  • Nuclear Energy and Engineering
  • Condensed Matter Physics

Cite this

Diagnostics of low-density glow discharge plasmas using Thomson scattering. / Muraoka, K.; Uchino, Kiichiro; Bowden, M. D.

In: Plasma Physics and Controlled Fusion, Vol. 40, No. 7, 01.12.1998, p. 1221-1239.

Research output: Contribution to journalReview article

@article{6736e9d06cc4478fba4454e7513fe0ae,
title = "Diagnostics of low-density glow discharge plasmas using Thomson scattering",
abstract = "In recent years, the method of incoherent Thomson scattering has been applied to make measurements of electron properties of glow discharges used for industrial applications. These plasmas have electron density of the order of 1017 m-3 and electron temperature of a few eV. This paper reviews the recent progress in this research area. Details of the experimental systems are given and examples of measurements made in several different types of glow discharges are presented. A method in which Thomson scattering is combined with Rayleigh scattering to provide direct measurements of the neutral density is also described and an example of measurements is given. The electron velocity and energy distribution functions are also an important property of these plasmas, and the extent to which Thomson scattering can measure the distribution function is discussed. Future trends for Thomson scattering in glow discharges are also discussed.",
author = "K. Muraoka and Kiichiro Uchino and Bowden, {M. D.}",
year = "1998",
month = "12",
day = "1",
doi = "10.1088/0741-3335/40/7/002",
language = "English",
volume = "40",
pages = "1221--1239",
journal = "Plasma Physics and Controlled Fusion",
issn = "0741-3335",
publisher = "IOP Publishing Ltd.",
number = "7",

}

TY - JOUR

T1 - Diagnostics of low-density glow discharge plasmas using Thomson scattering

AU - Muraoka, K.

AU - Uchino, Kiichiro

AU - Bowden, M. D.

PY - 1998/12/1

Y1 - 1998/12/1

N2 - In recent years, the method of incoherent Thomson scattering has been applied to make measurements of electron properties of glow discharges used for industrial applications. These plasmas have electron density of the order of 1017 m-3 and electron temperature of a few eV. This paper reviews the recent progress in this research area. Details of the experimental systems are given and examples of measurements made in several different types of glow discharges are presented. A method in which Thomson scattering is combined with Rayleigh scattering to provide direct measurements of the neutral density is also described and an example of measurements is given. The electron velocity and energy distribution functions are also an important property of these plasmas, and the extent to which Thomson scattering can measure the distribution function is discussed. Future trends for Thomson scattering in glow discharges are also discussed.

AB - In recent years, the method of incoherent Thomson scattering has been applied to make measurements of electron properties of glow discharges used for industrial applications. These plasmas have electron density of the order of 1017 m-3 and electron temperature of a few eV. This paper reviews the recent progress in this research area. Details of the experimental systems are given and examples of measurements made in several different types of glow discharges are presented. A method in which Thomson scattering is combined with Rayleigh scattering to provide direct measurements of the neutral density is also described and an example of measurements is given. The electron velocity and energy distribution functions are also an important property of these plasmas, and the extent to which Thomson scattering can measure the distribution function is discussed. Future trends for Thomson scattering in glow discharges are also discussed.

UR - http://www.scopus.com/inward/record.url?scp=22244465230&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=22244465230&partnerID=8YFLogxK

U2 - 10.1088/0741-3335/40/7/002

DO - 10.1088/0741-3335/40/7/002

M3 - Review article

AN - SCOPUS:22244465230

VL - 40

SP - 1221

EP - 1239

JO - Plasma Physics and Controlled Fusion

JF - Plasma Physics and Controlled Fusion

SN - 0741-3335

IS - 7

ER -