Diamond-like carbon film deposition on PZT ferroelectrics and YBCO superconducting films using KrF excimer laser deposition

K. Ebihara; F. Mitsugi; M. Yamazato; Y. Yamagata

doi:10.1016/S1359-8368(99)00033-5

Diamond-like carbon film deposition on PZT ferroelectrics and YBCO superconducting films using KrF excimer laser deposition

K. Ebihara, F. Mitsugi, M. Yamazato, Y. Yamagata

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Ferroelectric PbZr_0.52Ti_0.48O₃ (PZT) and superconducting YBa₂Cu₃O_7-x (YBCO) thin films were coated by unhydrogenated diamond-like carbon (DLC) films in order to reduce the aging degradation. Excimer laser ablation technique is applied to prepare PZT, YBCO and DLC films. The 60 days aging degradation of the DLC coated YBCO structure is limited within only 10% decay of normal resistivity. The polarization-electric field characteristics of the ferroelectric capacitor Au/PZT/YBCO/MgO shows a remanent polarization of 23.2 μC/cm² and a coercive field of 54.0 kV/cm. At least 10% decay of these ferroelectric values was observed after 60 days exposure to atmosphere.

Original language	English
Pages (from-to)	685-689
Number of pages	5
Journal	Composites Part B: Engineering
Volume	30
Issue number	7
DOIs	https://doi.org/10.1016/S1359-8368(99)00033-5
Publication status	Published - Oct 1999
Externally published	Yes

All Science Journal Classification (ASJC) codes

Ceramics and Composites
Mechanics of Materials
Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1016/S1359-8368(99)00033-5

Cite this

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title = "Diamond-like carbon film deposition on PZT ferroelectrics and YBCO superconducting films using KrF excimer laser deposition",

abstract = "Ferroelectric PbZr0.52Ti0.48O3 (PZT) and superconducting YBa2Cu3O7-x (YBCO) thin films were coated by unhydrogenated diamond-like carbon (DLC) films in order to reduce the aging degradation. Excimer laser ablation technique is applied to prepare PZT, YBCO and DLC films. The 60 days aging degradation of the DLC coated YBCO structure is limited within only 10% decay of normal resistivity. The polarization-electric field characteristics of the ferroelectric capacitor Au/PZT/YBCO/MgO shows a remanent polarization of 23.2 μC/cm2 and a coercive field of 54.0 kV/cm. At least 10% decay of these ferroelectric values was observed after 60 days exposure to atmosphere.",

author = "K. Ebihara and F. Mitsugi and M. Yamazato and Y. Yamagata",

year = "1999",

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doi = "10.1016/S1359-8368(99)00033-5",

language = "English",

volume = "30",

pages = "685--689",

journal = "Composites Part B: Engineering",

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TY - JOUR

T1 - Diamond-like carbon film deposition on PZT ferroelectrics and YBCO superconducting films using KrF excimer laser deposition

AU - Ebihara, K.

AU - Mitsugi, F.

AU - Yamazato, M.

AU - Yamagata, Y.

PY - 1999/10

Y1 - 1999/10

N2 - Ferroelectric PbZr0.52Ti0.48O3 (PZT) and superconducting YBa2Cu3O7-x (YBCO) thin films were coated by unhydrogenated diamond-like carbon (DLC) films in order to reduce the aging degradation. Excimer laser ablation technique is applied to prepare PZT, YBCO and DLC films. The 60 days aging degradation of the DLC coated YBCO structure is limited within only 10% decay of normal resistivity. The polarization-electric field characteristics of the ferroelectric capacitor Au/PZT/YBCO/MgO shows a remanent polarization of 23.2 μC/cm2 and a coercive field of 54.0 kV/cm. At least 10% decay of these ferroelectric values was observed after 60 days exposure to atmosphere.

AB - Ferroelectric PbZr0.52Ti0.48O3 (PZT) and superconducting YBa2Cu3O7-x (YBCO) thin films were coated by unhydrogenated diamond-like carbon (DLC) films in order to reduce the aging degradation. Excimer laser ablation technique is applied to prepare PZT, YBCO and DLC films. The 60 days aging degradation of the DLC coated YBCO structure is limited within only 10% decay of normal resistivity. The polarization-electric field characteristics of the ferroelectric capacitor Au/PZT/YBCO/MgO shows a remanent polarization of 23.2 μC/cm2 and a coercive field of 54.0 kV/cm. At least 10% decay of these ferroelectric values was observed after 60 days exposure to atmosphere.

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Diamond-like carbon film deposition on PZT ferroelectrics and YBCO superconducting films using KrF excimer laser deposition

Abstract

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