Diamond-like carbon film deposition on PZT ferroelectrics and YBCO superconducting films using KrF excimer laser deposition

K. Ebihara, F. Mitsugi, M. Yamazato, Y. Yamagata

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4 Citations (Scopus)

Abstract

Ferroelectric PbZr0.52Ti0.48O3 (PZT) and superconducting YBa2Cu3O7-x (YBCO) thin films were coated by unhydrogenated diamond-like carbon (DLC) films in order to reduce the aging degradation. Excimer laser ablation technique is applied to prepare PZT, YBCO and DLC films. The 60 days aging degradation of the DLC coated YBCO structure is limited within only 10% decay of normal resistivity. The polarization-electric field characteristics of the ferroelectric capacitor Au/PZT/YBCO/MgO shows a remanent polarization of 23.2 μC/cm2 and a coercive field of 54.0 kV/cm. At least 10% decay of these ferroelectric values was observed after 60 days exposure to atmosphere.

Original languageEnglish
Pages (from-to)685-689
Number of pages5
JournalComposites Part B: Engineering
Volume30
Issue number7
DOIs
Publication statusPublished - Oct 1999
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Mechanics of Materials
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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