Diamond tip arrays for parallel lithography and data storage

Fumiya Watanabe, Makoto Arita, Teruaki Motooka, Ken Okano, Takatoshi Yamada

    Research output: Contribution to journalArticlepeer-review

    2 Citations (Scopus)

    Abstract

    We propose a device capable of massively parallel nanoscale lithography and data storage due to a uniform array of diamond tips. A prototype device is constructed and demonstrated by forming patterns on silicon wafer surfaces. In our initial study, surface layers on silicon are selectively removed in parallel by mechanical ablation and microsized carbon islands are deposited in air. Nearly all the lithographic and data storage techniques derived from proximal probe techniques are expected to benefit from the diamond tip array method.

    Original languageEnglish
    Pages (from-to)L562-L564
    JournalJapanese Journal of Applied Physics, Part 2: Letters
    Volume37
    Issue number5 PART A
    DOIs
    Publication statusPublished - May 1 1998

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy (miscellaneous)
    • Physics and Astronomy(all)

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