Dilute hydrogen sulfide sensing properties of copper oxide-tin oxide thin film prepared by low-pressure evaporation

Jun Tamaki, Kengo Shimanoe, Yoshihiro Yamada, Yoshifumi Yamamoto, Norio Miura, Noboru Yamazoe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Thin films of SnO2 and CuO-SnO2 were prepared by evaporation from tin and copper metals under a low pressure (1 torr) of air atmosphere. As observed with AFM, these evaporated films had unique microstructure in which discrete clusters of SnO2 grains contacted to each other three-dimensionally with large mesopores penetrating between. The film added with a small amount of CuO was very sensitive to H2S in air, being able to detect dilute H2S close to 0.02 ppm at 300°C. The high sensitivity seems to result from the unique promoting effect of CuO coupled with the unique microstructure of the film.

Original languageEnglish
Title of host publicationInternational Conference on Solid-State Sensors and Actuators, Proceedings
PublisherIEEE
Pages987-990
Number of pages4
Volume2
Publication statusPublished - 1997
Externally publishedYes
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA
Duration: Jun 16 1997Jun 19 1997

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
CityChicago, IL, USA
Period6/16/976/19/97

Fingerprint

Copper oxides
Hydrogen sulfide
Tin oxides
Oxide films
Evaporation
Thin films
Microstructure
Air
Tin
Copper
Metals

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Tamaki, J., Shimanoe, K., Yamada, Y., Yamamoto, Y., Miura, N., & Yamazoe, N. (1997). Dilute hydrogen sulfide sensing properties of copper oxide-tin oxide thin film prepared by low-pressure evaporation. In International Conference on Solid-State Sensors and Actuators, Proceedings (Vol. 2, pp. 987-990). IEEE.

Dilute hydrogen sulfide sensing properties of copper oxide-tin oxide thin film prepared by low-pressure evaporation. / Tamaki, Jun; Shimanoe, Kengo; Yamada, Yoshihiro; Yamamoto, Yoshifumi; Miura, Norio; Yamazoe, Noboru.

International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 2 IEEE, 1997. p. 987-990.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tamaki, J, Shimanoe, K, Yamada, Y, Yamamoto, Y, Miura, N & Yamazoe, N 1997, Dilute hydrogen sulfide sensing properties of copper oxide-tin oxide thin film prepared by low-pressure evaporation. in International Conference on Solid-State Sensors and Actuators, Proceedings. vol. 2, IEEE, pp. 987-990, Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), Chicago, IL, USA, 6/16/97.
Tamaki J, Shimanoe K, Yamada Y, Yamamoto Y, Miura N, Yamazoe N. Dilute hydrogen sulfide sensing properties of copper oxide-tin oxide thin film prepared by low-pressure evaporation. In International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 2. IEEE. 1997. p. 987-990
Tamaki, Jun ; Shimanoe, Kengo ; Yamada, Yoshihiro ; Yamamoto, Yoshifumi ; Miura, Norio ; Yamazoe, Noboru. / Dilute hydrogen sulfide sensing properties of copper oxide-tin oxide thin film prepared by low-pressure evaporation. International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 2 IEEE, 1997. pp. 987-990
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AU - Tamaki, Jun

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AU - Miura, Norio

AU - Yamazoe, Noboru

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AB - Thin films of SnO2 and CuO-SnO2 were prepared by evaporation from tin and copper metals under a low pressure (1 torr) of air atmosphere. As observed with AFM, these evaporated films had unique microstructure in which discrete clusters of SnO2 grains contacted to each other three-dimensionally with large mesopores penetrating between. The film added with a small amount of CuO was very sensitive to H2S in air, being able to detect dilute H2S close to 0.02 ppm at 300°C. The high sensitivity seems to result from the unique promoting effect of CuO coupled with the unique microstructure of the film.

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