Dilute hydrogen sulfide sensing properties of copper oxide-tin oxide thin film prepared by low-pressure evaporation

Jun Tamaki, Kengo Shimanoe, Yoshihiro Yamada, Yoshifumi Yamamoto, Norio Miura, Noboru Yamazoe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Thin films of SnO2 and CuO-SnO2 were prepared by evaporation from tin and copper metals under a low pressure (1 torr) of air atmosphere. As observed with AFM, these evaporated films had unique microstructure in which discrete clusters of SnO2 grains contacted to each other three-dimensionally with large mesopores penetrating between. The film added with a small amount of CuO was very sensitive to H2S in air, being able to detect dilute H2S close to 0.02 ppm at 300°C. The high sensitivity seems to result from the unique promoting effect of CuO coupled with the unique microstructure of the film.

Original languageEnglish
Title of host publicationInternational Conference on Solid-State Sensors and Actuators, Proceedings
PublisherIEEE
Pages987-990
Number of pages4
Volume2
Publication statusPublished - 1997
Externally publishedYes
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA
Duration: Jun 16 1997Jun 19 1997

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
CityChicago, IL, USA
Period6/16/976/19/97

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Fingerprint Dive into the research topics of 'Dilute hydrogen sulfide sensing properties of copper oxide-tin oxide thin film prepared by low-pressure evaporation'. Together they form a unique fingerprint.

Cite this