Dilute hydrogen sulfide sensing properties of CuO-SnO2 thin film prepared by low-pressure evaporation method

Jun Tamaki; Kengo Shimanoe; Yoshihiro Yamada; Yoshifumi Yamamoto; Norio Miura; Noboru Yamazoe

Dilute hydrogen sulfide sensing properties of CuO-SnO₂ thin film prepared by low-pressure evaporation method

Jun Tamaki, Kengo Shimanoe, Yoshihiro Yamada, Yoshifumi Yamamoto, Norio Miura, Noboru Yamazoe

Functional Materials Science

Research output: Contribution to journal › Article › peer-review

Abstract

A low pressure evaporation method was adopted for preparing SnO₂ and CuO-SnO₂ thin films. Metallic tin and copper were evaporated on the alumina substrate under a low pressure (1 torr) of air atmosphere. As observed with AFM, these evaporated films had unique microstructure in which discrete clusters of SnO₂ grains (30 nm) contacted to each other two-dimensionally with large mesopores penetrating between. The film added with a small amount of CuO exhibited very high sensitivity to H₂S in air, being able to detect dilute H₂S close to 0.02 ppm at 300 °C. The high sensitivity seems to result from the unique promoting effect of CuO coupled with the unique microstructure of the film.

Original language	English
Pages (from-to)	121-125
Number of pages	5
Journal	Sensors and Actuators, B: Chemical
Volume	49
Issue number	1-2
Publication status	Published - Jun 25 1998

All Science Journal Classification (ASJC) codes

Analytical Chemistry
Electrochemistry
Electrical and Electronic Engineering

Cite this

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abstract = "A low pressure evaporation method was adopted for preparing SnO2 and CuO-SnO2 thin films. Metallic tin and copper were evaporated on the alumina substrate under a low pressure (1 torr) of air atmosphere. As observed with AFM, these evaporated films had unique microstructure in which discrete clusters of SnO2 grains (30 nm) contacted to each other two-dimensionally with large mesopores penetrating between. The film added with a small amount of CuO exhibited very high sensitivity to H2S in air, being able to detect dilute H2S close to 0.02 ppm at 300 °C. The high sensitivity seems to result from the unique promoting effect of CuO coupled with the unique microstructure of the film.",

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AU - Tamaki, Jun

AU - Shimanoe, Kengo

AU - Yamada, Yoshihiro

AU - Yamamoto, Yoshifumi

AU - Miura, Norio

AU - Yamazoe, Noboru

PY - 1998/6/25

Y1 - 1998/6/25

N2 - A low pressure evaporation method was adopted for preparing SnO2 and CuO-SnO2 thin films. Metallic tin and copper were evaporated on the alumina substrate under a low pressure (1 torr) of air atmosphere. As observed with AFM, these evaporated films had unique microstructure in which discrete clusters of SnO2 grains (30 nm) contacted to each other two-dimensionally with large mesopores penetrating between. The film added with a small amount of CuO exhibited very high sensitivity to H2S in air, being able to detect dilute H2S close to 0.02 ppm at 300 °C. The high sensitivity seems to result from the unique promoting effect of CuO coupled with the unique microstructure of the film.

AB - A low pressure evaporation method was adopted for preparing SnO2 and CuO-SnO2 thin films. Metallic tin and copper were evaporated on the alumina substrate under a low pressure (1 torr) of air atmosphere. As observed with AFM, these evaporated films had unique microstructure in which discrete clusters of SnO2 grains (30 nm) contacted to each other two-dimensionally with large mesopores penetrating between. The film added with a small amount of CuO exhibited very high sensitivity to H2S in air, being able to detect dilute H2S close to 0.02 ppm at 300 °C. The high sensitivity seems to result from the unique promoting effect of CuO coupled with the unique microstructure of the film.

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Dilute hydrogen sulfide sensing properties of CuO-SnO₂ thin film prepared by low-pressure evaporation method

Abstract

All Science Journal Classification (ASJC) codes

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