Dilute hydrogen sulfide sensing properties of CuO-SnO2 thin film prepared by low-pressure evaporation method

Jun Tamaki, Kengo Shimanoe, Yoshihiro Yamada, Yoshifumi Yamamoto, Norio Miura, Noboru Yamazoe

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A low pressure evaporation method was adopted for preparing SnO2 and CuO-SnO2 thin films. Metallic tin and copper were evaporated on the alumina substrate under a low pressure (1 torr) of air atmosphere. As observed with AFM, these evaporated films had unique microstructure in which discrete clusters of SnO2 grains (30 nm) contacted to each other two-dimensionally with large mesopores penetrating between. The film added with a small amount of CuO exhibited very high sensitivity to H2S in air, being able to detect dilute H2S close to 0.02 ppm at 300 °C. The high sensitivity seems to result from the unique promoting effect of CuO coupled with the unique microstructure of the film.

Original languageEnglish
Pages (from-to)121-125
Number of pages5
JournalSensors and Actuators, B: Chemical
Issue number1-2
Publication statusPublished - Jun 25 1998


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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